李民康 1,2向显嵩 1,2周常河 1,2,*韦春龙 1[ ... ]朱世曜 1,2
作者单位
摘要
1 中国科学院上海光学精密机械研究所信息光学与光电技术实验室, 上海 201800
2 中国科学院大学材料与光电研究中心, 北京 100049
3 暨南大学光子技术研究院, 广东 广州 511443
二维光栅是光刻机光栅尺系统的核心元件。搭建了超精密激光直写系统,基于二维超精密工件台,通过旋转基片90°进行两次曝光,制作出栅线密度为1200 line/mm的二维光栅掩模。原子力显微镜和扫描电镜结果表明,所制作的掩模轮廓清晰,空间分布均匀。实验结果证明了超精密激光直写系统能够制作出二维光栅掩模,在制作大尺寸、高精度二维计量光栅方面有着广阔的应用前景。
光栅 超精密系统 激光直写 栅距测量 
光学学报
2019, 39(9): 0905001
Author Affiliations
Abstract
1 Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China
2 University of Chinese Academy of Sciences, Beijing 100049, China
We proposed a novel wavelength-spread compression technique for spectral beam combining of a diode laser array. A reflector, which is parallel to the grating, is introduced to achieve a double pass with a single grating. This facilitated the reduction of the wavelength spread by half and doubled the number of combined elements in the gain range of the diode laser. We achieved a power of 26.1 W under continuous wave operation using a 19 element single bar with a wavelength spread of 6.3 nm, which is nearly half of the original wavelength spread of 14.2 nm, demonstrating the double-compressed spectrum capability of this structure. The spectral beam combining efficiency was 63.7%. The grating efficiency and reflector reflectance were both over 95%; hence, the efficiency loss of the double-pass grating with a reflector is acceptable. In contrast to double-grating methods, the proposed method introduces a reflector that efficiently uses the single grating and shows significant potential for a more efficient spectral beam combining of diode laser arrays.
140.2010 Diode laser arrays 140.3290 Laser arrays 140.3298 Laser beam combining 
Chinese Optics Letters
2018, 16(7): 071402
Author Affiliations
Abstract
1 Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China
2 University of Chinese Academy of Sciences, Beijing 100049, China
We propose a nonparallel double-grating structure in a spectral-beam combining technique, where two gratings are placed nonparallel satisfying the Littrow mount in the focal region of the convergent lens. The most attractive advantage of this approach is that it will compress the spectral span into half of its original spectrum, which means the number of combined elements can be doubled in the gain range of diode lasers. Experimental results demonstrate that the CW output power of the combined beam is 30.9 W with a spectral span of 7.0 nm, compared with its original spectrum span of 13.6 nm, and the spectral beam combining efficiency is 70.5%. In consideration that a single grating could have a high efficiency of >97% in a bandwidth of over ten nanometers, the efficiency loss of the grating pair should be less than 6%, which is acceptable for most applications, so this method of using double gratings should be highly interesting for practical applications when a nearly doubled number of diode lasers could be combined into one single laser compared with the previous single-grating methods.
140.2010 Diode laser arrays 140.3290 Laser arrays 140.3298 Laser beam combining 050.1950 Diffraction gratings 
Chinese Optics Letters
2017, 15(9): 091403
作者单位
摘要
1 上海大学(延长校区)精密机械工程系, 上海 200072
2 上海大学(延长校区)通信工程系, 上海 200072
提出了一种新的最小二乘迭代算法,能有效消除因相移器存在导向误差面使相移平面倾斜从而导致的相移误差。当相移器存在的相移误差包括位移误差与倾斜误差时,同一幅干涉图诸像素点的相移并不同步,但其相移量在同一平面上。求解此平面,即可消除相移误差。通过求解由一阶泰勒展开式得到的线性方程组,避免了为求解此平面而求解非线性方程组最小二乘解的过程,使算法简化。利用迭代法,保证求解的精度。并通过数值模拟,验证了这种算法在消除较大的相移器倾斜及位移误差影响上具有良好的效果。
相移干涉术 相移误差 最小二乘解 迭代法 
光学学报
2001, 21(1): 72
作者单位
摘要
1 上海大学(嘉定校区)电子工程系, 上海 201800
2 上海大学(嘉定校区)机械工程系, 上海 201800
3 中国科学院上海光学精密机械研究所, 上海 201800
提出了一种新的相位去包裹算法,主要针对光学光滑表面以及由于少数低调制度点、散斑点、噪声或灰尘(以下简称误差点)引起的去包裹失败的情形。该算法运用泽尼特(Zernike)多项式对误差点区域进行拟合,通过一定阈值的设置,将误差点清除并予以拟合,具有计算快速的特点。
干涉术 条纹分析 泽尼特多项式 去包裹算法 
光学学报
1998, 18(7): 912
作者单位
摘要
1 上海大学嘉定校区通信工程系,上海 201800
2 上海大学嘉定校区机械工程系,上海 201800
3 中国科学院上海光机所,上海 201800
提出了一种新的相位去包裹算法,主要针对那些条纹数少,条纹质量相对较好,仅仅是由于少数低调制度点、散斑点、噪声或灰尘引起的去包裹失败的情形。该算法基于一维FFT(快速傅里叶变换),简单且易于实现。
干涉术 条纹分析 去包裹算法 
中国激光
1998, 25(9): 813
作者单位
摘要
1 上海科技大学无线电系, 上海 201800
2 浙江大学光科系, 杭州 310027
对0.532 μm波长光泵浦的BBO光参量振荡器产生线宽的机制进行了详细分析和计算,结果与实验基本一致,实验结果表明泵浦光发散角是产生线宽的主要因素。文中的分析方法可推广至其它单轴晶体光参量振荡器线宽的分析。
光参量振荡器 线宽 
光学学报
1995, 15(12): 1646
作者单位
摘要
1 上海科技大学无线电系, 上海 201800
2 浙江大学光科系, 杭州 310027
报道0.532 μm泵浦的光栅腔BBO光参量振荡器的实验研究结果.在1.02~1.08 μm可调谐范围内,其输出线宽小于1 nm,参量转换效率为3.5%.
BBO晶体 光参量振荡器 
光学学报
1994, 14(10): 1036

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