Author Affiliations
Abstract
1 State Key Laboratory of Fabrication Technologies for Integrated Circuits, Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029, China
2 Frontier institute of Chip and System, Fudan University, Shanghai 200433, China
3 College of Electronic Science and Technology, National University of Defense Technology, Changsha 410073, China
4 University of Chinese Academy of Sciences, Beijing 100049, China
The performance and reliability of ferroelectric thin films at temperatures around a few Kelvin are critical for their application in cryo-electronics. In this work, TiN/Hf0.5Zr0.5O2/TiN capacitors that are free from the wake-up effect are investigated systematically from room temperature (300 K) to cryogenic temperature (30 K). We observe a consistent decrease in permittivity (εr) and a progressive increase in coercive electric field (Ec) as temperatures decrease. Our investigation reveals exceptional stability in the double remnant polarization (2Pr) of our ferroelectric thin films across a wide temperature range. Specifically, at 30 K, a 2Pr of 36 μC/cm2 under an applied electric field of 3.0 MV/cm is achieved. Moreover, we observed a reduced fatigue effect at 30 K in comparison to 300 K. The stable ferroelectric properties and endurance characteristics demonstrate the feasibility of utilizing HfO2 based ferroelectric thin films for cryo-electronics applications.
hafnia-zirconia solid solution ferroelectricity cryogenic temperature wake-up effect Journal of Semiconductors
2024, 45(3): 032301
1 中国科学院上海技术物理研究所,上海 200083
2 中国科学院大学,北京 100049
大阵列BIB探测器由于其高量子效率和低暗电流而成为广泛的研究对象,特别是在空间应用方向。如2021年发射的詹姆斯韦伯太空望远镜,它已经进行了许多重要的天文观测。一个稳定、高效、轻量化的液氦温区低温系统对BIB探测器的运行至关重要。氦节流制冷机可取代传统的大容积液氦杜瓦,能满足空间液氦温区的制冷要求。为了同时提高4.2 K的制冷量并减轻重量,提出了一种0.3 W@4.2 K的大冷量轻量化的4.2 K低温制冷系统。并且在现有0.1 W@4.1 K制冷量的低温系统上进行实验,验证了该系统的设计方法。在不同的冷却温度区采用不同的冷却方法,以实现冷却的高效性和轻便性。开发了一个新的集成斯特林制冷机,在80 K时提供高效的一级预冷,制冷量为15 W,重量仅为4.5 kg;二级预冷采用主动活塞调相的15 K脉管制冷机,制冷量为0.9 W。此多级低温制冷系统通过耦合氦气JT循环,可以在4.2 K时提供0.3 W的制冷量,输入功低于1.8 kW。此系统将为正在快速发展的红外天文观测所需的空间BIB探测器提供保障。
低温系统 空间BIB探测器 斯特林 脉冲管 焦汤节流 液氦 多级制冷机 cryogenic system space BIB detection stirling pulse tube JT liquid helium multi-stage cryocooler
1 中国科学院上海技术物理研究所传感技术国家重点实验室,上海 200083
2 中国科学院上海技术物理研究所红外成像材料与器件重点实验室,上海 200083
3 中国科学院大学,北京 100039
集成冷光学的红外探测器杜瓦封装在中波、长波红外组件研制中具有重要意义,有利于抑制红外辐射背景、提升仪器灵敏度和集成度。提出了集成冷光学的中波、长波双波段探测器杜瓦组件,设计了一体化冷平台支撑、低漏热透镜支撑等新结构,解决了冷光学透镜组与探测器组合、双波段探测器透镜组之间高精度配准及高强度单点支撑钎焊等新工艺,建立了该冷光学集成组件杜瓦的冷面温度均匀性、双温区控制以及低热负载等关键参数。实现了杜瓦液氮热负载小于0.85 W,中波工作于73 K,冷面温度均匀性0.36 K,长波工作于65 K,冷面温度均匀性0.08 K,探测器与透镜组配准精度偏差优于±10 μm,探测器光学模组间配准偏差优于±15 μm。该新型杜瓦已通过一系列空间环境适应性试验验证,成功应用于风云四号系列气象卫星大气垂直探测仪中。
光学设计 双波段红外探测器 杜瓦集成封装 冷光学 低温透镜组 高精度配准 中国激光
2023, 50(23): 2310003
Author Affiliations
Abstract
1 State Key Laboratory of Functional Materials for Informatics, Shanghai Institute of Microsystem and Information Technology (SIMIT), Chinese Academy of Sciences (CAS), Shanghai 200050, China
2 CAS Center for Excellence in Superconducting Electronics (CENSE), Shanghai 200050, China
3 Ori-chip Optoelectronics Technology Ltd., Ningbo 315000, China
4 School of Physical Science and Technology, ShanghaiTech University, Shanghai 201210, China
We propose and demonstrate a cryogenic thermo-optic (TO) modulator in x-cut thin-film lithium niobate (TFLN) with an NbN superconducting heater. Compared to a conventional metal heating electrode, a fast and energy-efficient modulation is obtained by placing an NbN superconducting heating electrode above the TFLN waveguide. The transition of the NbN superconducting electrode between superconducting and normal states turns the heating and cooling processes from continuous to discontinuous change. Thus, the energy consumption during the modulation process is reduced proportionally. The rise/fall time of the proposed device is 22 µs/15 µs, which has been the fastest response time reported in TFLN thermo-optic modulators so far. The presented TO modulator can easily be used at cryogenic temperatures and has great potential for applications in cryogenic optoelectronics.
cryogenic modulator lithium niobate superconductance Chinese Optics Letters
2023, 21(8): 081301
Author Affiliations
Abstract
Engineering Faculty, Electrical and Electronic Department, Cankaya University, Ankara, Turkey
This study focuses on generating and manipulating squeezed states with two external oscillators coupled by an InP HEMT operating at cryogenic temperatures. First, the small-signal nonlinear model of the transistor at high frequency at 5 K is analyzed using quantum theory, and the related Lagrangian is theoretically derived. Subsequently, the total quantum Hamiltonian of the system is derived using Legendre transformation. The Hamiltonian of the system includes linear and nonlinear terms by which the effects on the time evolution of the states are studied. The main result shows that the squeezed state can be generated owing to the transistor’s nonlinearity; more importantly, it can be manipulated by some specific terms introduced in the nonlinear Hamiltonian. In fact, the nonlinearity of the transistors induces some effects, such as capacitance, inductance, and second-order transconductance, by which the properties of the external oscillators are changed. These changes may lead to squeezing or manipulating the parameters related to squeezing in the oscillators. In addition, it is theoretically derived that the circuit can generate two-mode squeezing. Finally, second-order correlation (photon counting statistics) is studied, and the results demonstrate that the designed circuit exhibits antibunching, where the quadrature operator shows squeezing behavior.
quantum theory squeezed state cryogenic low noise amplifier InP HEMT Journal of Semiconductors
2023, 44(5): 052901
1 中国科学院上海光学精密机械研究所高功率激光物理联合实验室,上海 201800
2 中国科学院大学材料与光电研究中心,北京 100049
在高功率激光装置冷冻靶系统中,靶架的细长悬臂梁结构对冷冻靶内部振源有着较大的振动响应,从而会影响装置的束靶耦合精度。针对该问题,研究了长悬臂梁的附加式减振结构,在不增加整体外形尺寸和质量的前提下,通过增加悬臂梁支撑点的方式增大结构比刚度,从而优化其振动响应特性。以美国国家点火装置(NIF)中的靶架作为研究设计主体,通过建立数学模型明确了响应函数的主要、次要影响参数;利用ANSYS有限元模拟的方法确定了重要工程参数的取值范围;通过自主搭建的实验台模拟了不同工况下的振源并对减振靶架进行测试,最佳方案中的振幅优化率为91.7%,冲击收敛时间优化率为77.1%,固有频率达到183 Hz,证明了所设计的减振结构对长悬臂梁的振动响应特性有较好的优化作用。
激光器 结构设计 振动控制 有限元法 参数优化 冷冻靶 高功率激光装置 中国激光
2023, 50(10): 1001003