1 中国工程物理研究院激光聚变研究中心,四川 绵阳 621900
2 天津大学 精密仪器与光电子工程学院超快激光实验室；光电信息技术科学教育部重点实验室，天津300072
利用聚焦的飞秒激光（中心波长775 nm、脉宽150 fs）照射FOTURAN光敏玻璃，经热处理及浓度为8％的氢氟酸溶液室温腐蚀50 min后，在FOTURAN玻璃表面制作了微凹面.利用原子力显微镜和扫描电子显微镜分析了微凹面的形貌，发现它具有光滑璧面和清晰边缘，直径约为几十微米.通过分别改变入射激光的单脉冲能量(970~3250 nJ)和脉冲数目(10~3000个)，研究了它们对微凹面制作结果的影响，发现了微凹面的直径随激光入射参量的饱和效应，并解释了其原因；指出了飞秒激光在FOTURAN上制作微结构的应用.
飞秒激光 微凹面 微细加工 FOTURAN玻璃 光敏玻璃 Femtosecond laser Micro-concave-surface Micromachining FOTURAN glass Photosensitive glass
Author Affiliations
Abstract
1 Ultrafast Laser Laboratory, School of Precision Instruments and Optoeletronics Engineering
2 Key Laboratory of Optoelectronic Information Technical Science, Ministry of Education, Tianjin University, Tianjin 3000722Electronic Engineering Department, Tianjin University of Technology and Education, Tianjin 300222
Lines are induced on the surface of a photosensitive (FOTURAN) glass by focused femtosecond laser transverse writing with scanning velocity in a wide range of 40-1800 μm/s. The formed lines are analyzed using scanning electron microscope (SEM) and optical microscope (OM). It is observed that three distinct morphologies of lines are produced depending on the scanning velocity. Lines written in low velocity level (40-100 μm/s) and high velocity level (1000-1800 μm/s) are uniform and regular, while those written in moderate velocity level (150-600 μm/s) are rough. The influence of scanning velocity is explained based on different pulses overlapping or cumulative dose of laser exposure in irradiated area. Fabrication of shallow groove on the surface is also demonstrated.
诱导线 飞秒激光 扫描速度 FOTURAN 光敏玻璃 140.3390 Laser materials processing 140.7090 Ultrafast lasers 230.4000 Microstructure fabrication 130.3120 Integrated optics devices Chinese Optics Letters
2008, 6(1): 0151
