邵晶 1,2,*李卓 1,2聂真威 3董浩 1,2[ ... ]赵发财 6
作者单位
摘要
1 青岛理工大学山东省激光绿色智能制造与设备协同创新中心,山东 青岛 266520
2 工业流体节能与污染控制教育部重点实验室,山东 青岛 266520
3 中国科学院长春光学精密机械与物理研究所,吉林 长春 130033
4 北京长峰科威光电技术有限公司,北京 100195
5 中国科学院大学,北京 100049
6 中国电子科技集团公司第四十一研究所,山东 青岛 266555
为抑制光学系统内部的杂散光反射,设计了一种具有非对称特征的新型微结构。该微结构通过减少镜面反射的方式,防止外部杂散光到达光学系统像面位置。为实现对非对称微结构的激光高速加工制备,提出了激光振镜加工系统进行倾斜加工的新方式。设计了新型的高速激光加工平台,制备了非对称的铝基微结构,并搭建了镜面反射测试实验和仿真综合实验对样品进行对比测试。结果表明,加工样品对杂散光具有良好的抑制效果。当设定入射角度为15°、照明光束为650 nm激光时,该微结构与常规的阳极氧化表面相比,抑制杂散光的性能提高了10倍,相对反射率仅为0.008%。
光学设计 微结构制备 纳秒激光 激光材料加工 杂散光抑制 
光学学报
2023, 43(11): 1122001
作者单位
摘要
1 广西大学机械工程学院,广西 南宁 530004
2 中国科学院深圳先进技术研究院,广东 深圳 518055
红外光学成像系统的灵敏度与光学窗口透射率密切相关,锗窗口是红外光学系统的常用窗口,在锗窗口上制备亚波长结构可以增强抗反射性能从而提高透射率,且常选择凸面窗口以获得更大的视场角。针对在曲面窗口上亚波长结构的制备工艺较为复杂的难题,本文运用柔性紫外纳米压印方法(soft UV-NIL),在凸面锗窗口表面高效、高质量地制作了亚波长抗反射结构。首先基于时域有限差分方法优化设计了亚波长抗反射结构参数,然后基于soft UV-NIL工艺制备了符合设计要求的亚波长结构。测试结果表明,在3.55~5.55 μm波长范围内,凸面锗窗口单面平均透射率由65.81%提升到78.68%,在波长为4.4 μm处,透射率由65.85%提升至83.13%,实现了中红外宽波段抗反射效果。
光学设计 微结构制造 亚波长结构 柔性紫外纳米压印 抗反射 
激光与光电子学进展
2023, 60(5): 0522001
张登英 1,2,3,4,*朱林伟 3李伟任 3高鸿鹄 3[ ... ]徐征 1,4,**
作者单位
摘要
1 北京交通大学光电子技术研究所,北京 100044
2 北京太阳能电力研究院有限公司,北京 101102
3 鲁东大学物理与光电工程学院,山东 烟台 264025
4 北京交通大学发光与光信息技术教育部重点实验室,北京 100044
设计了两种具有不同参数的光刻掩模版,利用光刻技术制备了两种微米级双层复合结构。研究了曝光能量对凹形缺口深度的影响,同时采用有限差分时域法分析了掩模版曝光时的光场分布情况,阐明了微米级双层复合结构形成的物理机理。实验结果表明:通过调整曝光能量的大小,能够有效地控制凹形缺口的深度。对8 μm厚的AZ9260光刻胶来说,不高于160 mJ/cm2的曝光能量是制备出微米级双层复合结构的关键。该技术在制备微米尺寸的分层器件方面有着潜在的应用前景。
光学器件 微结构制造 光刻 微米级双层复合结构 有限差分时域法 
光学学报
2023, 43(3): 0323002
李晶 1,*丛居平 1郭楠 1杜新 1[ ... ]杜锋 2
作者单位
摘要
1 长春理工大学机电工程学院,吉林 长春 130022
2 陆军装甲兵学院士官学校基础部,吉林 长春 130117
受自然界素饰蛱蝶翅膀鳞片表面结构的启发,本研究团队建立仿生结构模型,利用激光烧蚀技术在粗化铝合金表面构建了一种具有超疏水、低黏附、自清洁性能的仿生网格状多级结构。采用扫描电子显微镜(SEM)、X射线光电子能谱仪(XPS)、光学接触角测量仪和高速成像等设备对材料表面进行了表征分析,结果表明:喷砂粗化结合激光烧蚀可以形成类蛱蝶鳞片网格状多级结构,该结构具有复杂的形态和复合尺度特征,其表面具有超疏水性能,静态接触角可达到162.6°,滚动角小于5°;液滴弹跳试验和自清洁性能试验结果表明,该仿生结构表面具有良好的低黏附力和自清洁性能,在脱附、减阻、自清洁等领域具有一定的应用潜力。
激光技术 微观结构制造 超疏水表面 自清洁 低黏附 仿生结构 
中国激光
2022, 49(16): 1602009
作者单位
摘要
长春理工大学理学院, 吉林 长春 130022
具有润湿功能的微纳结构表面因在生物工程、防覆冰等领域的潜在应用价值,近年来吸引了大量的关注,但亲水微纳结构表面的润湿不稳定性成为了其应用中的一大阻碍。本文通过飞秒激光直写的方式在不锈钢表面制备了具有亲水性质的微纳结构表面并研究其经一定时间跨度后润湿性变化规律及机制。研究表明,在表面化学成分方面,不锈钢微纳结构表面通过浸泡氢氧化钠溶液处理后可有效抑制其润湿变化。通过X射线光电子能谱分析表明,这是由于处理前后润湿机制发生转变导致的。从微纳形貌方面,当不锈钢表面粗糙度增加时,可以通过保持长效毛细效应实现较长时间范围内的稳定超亲水状态。本文的研究结果为润湿性微纳结构表面的应用提供了一定的性能改善策略新思路,特别在亲水特性微纳结构表面的应用上具有重要的研究意义。
光学设计 微观结构制造 飞秒激光 润湿性 微纳结构 润湿转变 
中国激光
2021, 48(18): 1802001
Author Affiliations
Abstract
1 Department of Electrical Engineering, City University of Hong Kong, Kowloon, Hong Kong, China
2 State Key Laboratory of Terahertz and Millimeter Waves, City University of Hong Kong, Kowloon, Hong Kong, China
High-Q lithium niobate (LN) optical micro-resonators are an excellent platform for future applications in optical communications, nonlinear optics, and quantum optics. To date, high-Q factors are typically achieved in LN using either dielectric masks or femtosecond laser ablation, while the more standard and commonly available lift-off metallic masks are often believed to lead to rough sidewalls and lowered Q factors. Here, we show that LN microring resonators with strong light confinement and intrinsic Q factors over 1 million can be fabricated using optimized lift-off metallic masks and dry etching processes, corresponding to a waveguide propagation loss of 0.3 dB/cm. The entire process is fully compatible with wafer-scale production and could be transferred to other photonic materials.
lithium niobate optical resonators microstructure fabrication 
Chinese Optics Letters
2021, 19(6): 060010
Author Affiliations
Abstract
State Key Laboratory of Optoelectronic Materials and Technologies and School of Electronics and Information Technology, Sun Yat-sen University, Guangzhou 510000, China
Integrated traveling-wave lithium niobate modulators need relatively large device lengths to achieve low drive voltage. To increase modulation efficiency within a compact footprint, we report an integrated Fabry–Perot-type electro-optic thin film lithium niobate on insulator modulator comprising a phase modulation region sandwiched between two distributed Bragg reflectors. The device exhibits low optical loss and a high tuning efficiency of 15.7 pm/V. We also confirm the modulator’s high-speed modulation performance by non-return-to-zero modulation with a data rate up to 56 Gbit/s.
integrated optic devices lithium niobate optical modulators microstructure fabrication 
Chinese Optics Letters
2021, 19(6): 060003
Author Affiliations
Abstract
1 State Key Laboratory of High Field Laser Physics, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China
2 Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China
3 Technology Center, Huagong Laser Engineering Co., Ltd., Wuhan 430000, China
One-step precipitation of Ag nanoparticles in Ag+-doped silicate glasses was achieved through a focused picosecond laser with a high repetition rate. Absorption spectra and transmission electron microscopy (TEM) confirmed that metallic Ag nanoparticles were precipitated within glass samples in the laser-written domain. The surface plasmon absorbance fits well with the experimental absorption spectrum. The nonlinear absorption coefficient β is determined to be 2.47 × 10-14 m/W by fitting the open aperture Z-scan curve, which originated from the intraband transition in the s-p Ag band. The formation mechanism of Ag-glass nanocomposites is discussed as well.
nonlinear optical materials laser materials processing microstructure fabrication 
Chinese Optics Letters
2021, 19(1): 011901
Author Affiliations
Abstract
1 Laboratory of Quantum Electronics, Physics Faculty, University of Sciences and Technology Houari Boumediene, Algiers 16111, Algeria
2 Laboratoire de Chimie, Ens de Lyon, CNRS UMR 5182, Université de Lyon, Université Claude Bernard Lyon 1, Lyon 69342, France
The diffraction of a dielectric microline pair is optimized by numerical simulations to generate an efficient focusing pattern with a micron-scale footprint. Microlines separated by 1.12 μm are fabricated by two-photon polymerization on a glass substrate, and their diffraction pattern is characterized by three-dimensional wide-field transmission microscopy. A line pair, having a width W=0.40 μm and a height H=0.80 μm, leads to diffraction-limited focusing in the visible spectrum. Depending on wavelength, its focal length, lateral resolution, and depth of focus are in the ranges of 0.8–1.3 μm, 0.22–0.44 μm, and 1.7–2.13 μm, respectively. Such a microlens based on the diffraction of only two subwavelength scatterers could be used for the design of miniature optical sensors with micron and sub-micron pixels.
220.3630 Lenses 220.4000 Microstructure fabrication 
Chinese Optics Letters
2019, 17(8): 082201
Author Affiliations
Abstract
1 Department of Physics, Shanghai University, Shanghai 200444, China
2 State Key Laboratory of High Field Laser Physics, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China
Spatio-temporal coupling characteristics of ultrafast laser pulses are quantitatively tailored. An asymmetric microstructure is induced in the focal volume when the laser scans perpendicularly to the direction of the spatial chirp in fused silica. The tilted direction reverses when adding a Dove prism into the light path. The sign of the pulse front tilt can be turned from positive to negative by changing the group delay dispersion by steps. We reveal that the tilted direction of a microstructure depends on spatial chirp, and the interplay between spatio-temporal chirp leads to the change of tilted angles.
140.3390 Laser materials processing 220.4000 Microstructure fabrication 320.5540 Pulse shaping 
Chinese Optics Letters
2019, 17(8): 081402

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