Author Affiliations
Abstract
Laboratory of Information Optics and Optoelectronics Techniques, Shanghai Institute of Optics and Fine Mechanics, University of Chinese Academy of Sciences, Shanghai 201800, China
For manufacturing a fine optical glass lens, it is important to obtain a 3D profile of a semi-finished product with a rough surface. We develop an active binocular 3D scanning setup to measure the 3D profile of a rough surface optical element. Two cameras simultaneously capture the band-pass binary random patterns which are projected on the target object. The highlight of this system is using the temporal correlation technique to determine the stereo correspondence between the pixels of the two cameras. The 3D point cloud can be reconstructed by the triangulation principle. Experiment results confirmed that this method effectively measures the rough surface of an optical element with sufficient accuracy.
110.6880 Three-dimensional image acquisition 120.2830 Height measurements 150.6910 Three-dimensional sensing 330.1400 Vision - binocular and stereopsis Chinese Optics Letters
2015, 13(8): 081101
中国工程物理研究院 流体物理研究所， 冲击波物理与爆轰物理重点实验室， 四川 绵阳 621900
基于白光频域干涉的基本原理，提出了一种可实现高分辨率和大台阶高度测量的方法，利用该方法进行台阶高度测量时，其测量范围取决于所用干涉光源的中心波长和光谱仪的分辨率，可达mm量级。在原理验证性实验中，利用该方法已经实现了最大高度为298.57 μm的台阶高度测量，多次重复测量的标准偏差不超过0.03 μm，最大均方根误差为0.94 μm，实验测量结果与台阶高度真实值具有很好的一致性。
台阶 高度测量 频域干涉 量块 step height measurements frequency domain interferometry gauge block 强激光与粒子束
2015, 27(9): 091007
Author Affiliations
Abstract
Key Laboratory of Nondestructive Testing (Ministry of Education), Nanchang Hangkong University, Nanchang 330063, China
The grating fringe on the reference plane is broadened in the intersecting axis system because of oblique-angle projection. In order to solve this problem, we study the theoretical model of the temporal phase unwrapping method based on the fringe cycle correction. We also study the 3D shape measurement theoretical model of the larger complex objects after considering the coordinate deviation and lens distortion. Experimental results demonstrate that the fringe cycle on the reference plane can be corrected to a constant value, the lens distortion can be corrected, and 3D shape of larger complex objects can be accurately measured.
110.6880 Three-dimensional image acquisition 120.2650 Fringe analysis 120.2830 Height measurements 100.5088 Phase unwrapping Chinese Optics Letters
2014, 12(12): 121101
Author Affiliations
Abstract
Department of Optoelectronic Engineering, Beijing Insititute of Technology, Beijing 100081, China
We report the laboratory experiment on a segmented mirror testbed that shows the use of a dispersed Rayleigh interferometer to phase segmented mirrors. Segment alignment of tip-tilt is fulfilled by overlapping diffraction pattern centroids of the three individual segments on the focal plane. A spherical interferometer is introduced to evaluate the performance of piston, tip-tilt sensing, and control closed-loop, and finally a total residual root-mean-square (RMS) surface error of about 45 nm is achieved, in which a typical error of about 20 nm is contributed by piston. These results demonstrate that the dispersed Rayleigh interferometer can successfully sense the piston of segmented mirrors and be used in phasing segmented telescopes under extensive studies.
拼接镜面 共相位 色散瑞利干涉仪 共相位检测与控制平台 120.3180 Interferometry 120.1088 Adaptive interferometry 120.2830 Height measurements 120.6085 Space instrumentation Chinese Optics Letters
2009, 7(11): 1007
