Wei Yin 1,2,3†Yuxuan Che 1,2,3†Xinsheng Li 1,2,3Mingyu Li 1,2,3[ ... ]Chao Zuo 1,2,3,****
Author Affiliations
Abstract
1 Smart Computational Imaging Laboratory (SCILab), School of Electronic and Optical Engineering, Nanjing University of Science and Technology, Nanjing 210094, China
2 Smart Computational Imaging Research Institute (SCIRI) of Nanjing University of Science and Technology, Nanjing 210019, China
3 Jiangsu Key Laboratory of Spectral Imaging & Intelligent Sense, Nanjing 210094, China
4 Department of Electrical and Electronic Engineering, The University of Hong Kong, Pokfulam, Hong Kong SAR 999077, China
Recently, deep learning has yielded transformative success across optics and photonics, especially in optical metrology. Deep neural networks (DNNs) with a fully convolutional architecture (e.g., U-Net and its derivatives) have been widely implemented in an end-to-end manner to accomplish various optical metrology tasks, such as fringe denoising, phase unwrapping, and fringe analysis. However, the task of training a DNN to accurately identify an image-to-image transform from massive input and output data pairs seems at best na?ve, as the physical laws governing the image formation or other domain expertise pertaining to the measurement have not yet been fully exploited in current deep learning practice. To this end, we introduce a physics-informed deep learning method for fringe pattern analysis (PI-FPA) to overcome this limit by integrating a lightweight DNN with a learning-enhanced Fourier transform profilometry (LeFTP) module. By parameterizing conventional phase retrieval methods, the LeFTP module embeds the prior knowledge in the network structure and the loss function to directly provide reliable phase results for new types of samples, while circumventing the requirement of collecting a large amount of high-quality data in supervised learning methods. Guided by the initial phase from LeFTP, the phase recovery ability of the lightweight DNN is enhanced to further improve the phase accuracy at a low computational cost compared with existing end-to-end networks. Experimental results demonstrate that PI-FPA enables more accurate and computationally efficient single-shot phase retrieval, exhibiting its excellent generalization to various unseen objects during training. The proposed PI-FPA presents that challenging issues in optical metrology can be potentially overcome through the synergy of physics-priors-based traditional tools and data-driven learning approaches, opening new avenues to achieve fast and accurate single-shot 3D imaging.
optical metrology deep learning physics-informed neural networks fringe analysis phase retrieval 
Opto-Electronic Advances
2024, 7(1): 230034
Shijie Feng 1,2,3Yile Xiao 1,2,3Wei Yin 1,2,3Yan Hu 1,2,3[ ... ]Qian Chen 1,2,*
Author Affiliations
Abstract
1 Nanjing University of Science and Technology, Smart Computational Imaging Laboratory, Nanjing, China
2 Nanjing University of Science and Technology, Jiangsu Key Laboratory of Spectral Imaging and Intelligent Sense, Nanjing, China
3 Smart Computational Imaging Research Institute of Nanjing University of Science and Technology, Nanjing, China
In recent years, there has been tremendous progress in the development of deep-learning-based approaches for optical metrology, which introduce various deep neural networks (DNNs) for many optical metrology tasks, such as fringe analysis, phase unwrapping, and digital image correlation. However, since different DNN models have their own strengths and limitations, it is difficult for a single DNN to make reliable predictions under all possible scenarios. In this work, we introduce ensemble learning into optical metrology, which combines the predictions of multiple DNNs to significantly enhance the accuracy and reduce the generalization error for the task of fringe-pattern analysis. First, several state-of-the-art base models of different architectures are selected. A K-fold average ensemble strategy is developed to train each base model multiple times with different data and calculate the mean prediction within each base model. Next, an adaptive ensemble strategy is presented to further combine the base models by building an extra DNN to fuse the features extracted from these mean predictions in an adaptive and fully automatic way. Experimental results demonstrate that ensemble learning could attain superior performance over state-of-the-art solutions, including both classic and conventional single-DNN-based methods. Our work suggests that by resorting to collective wisdom, ensemble learning offers a simple and effective solution for overcoming generalization challenges and boosts the performance of data-driven optical metrology methods.
optical metrology fringe-pattern analysis deep learning ensemble learning three-dimensional measurement phase retrieval 
Advanced Photonics Nexus
2023, 2(3): 036010
作者单位
摘要
产业技术综合研究所分析测量标准研究部门,日本 筑波 305-8568
相移法是分析条纹图案相位信息的一种有力工具。介绍新开发的时空域相移法(ST-PSM)的基本原理和在非接触式三维形状测量中的应用。模拟结果表明,ST-PSM可以大幅减少随机噪声,同时可以消除图像传感器的非线性响应、动态范围小等对测量结果的影响。实验结果表明ST-PSM在曝光极端不足的条件下可以进行稳定的非接触形状测量。
三维光学测量 相位分析 傅里叶变换 时空分析 形状测量 
激光与光电子学进展
2023, 60(8): 0811024
潘兴臣 1,2刘诚 1,2,*肖伟刚 3朱健强 1,2,**
作者单位
摘要
1 中国科学院上海光学精密机械研究所高功率激光物理联合实验室,上海 201800
2 中国科学院中国工程物理研究院高功率激光物理联合实验室,上海 201800
3 中国科学院重大科技任务局,北京 100864
近些年新出现的层叠相位重建引擎(PIE)是一种能够有效解决相位测量难题的无透镜成像技术,相比于传统的相干衍射成像技术,PIE技术具备更高的重建精度、更好的收敛性。由于理论上具备可无限拓展的视场范围、超高分辨能力和对噪声的强鲁抗性,PIE目前被广泛应用于各种相位成像和相位测量领域。讨论了PIE技术提出的背景和核心原理,同时总结了近些年该类算法的主要技术突破,特别地,讨论了PIE技术在X射线、电子束和可见光波段成像领域的关键节点。此外,还总结了在其他领域中基于PIE技术的变形算法,并对将来可能的技术突破点和所面临的挑战进行了讨论。
相位恢复 层叠相位重建 波前重建 迭代计算 光学检测 波前诊断 超快测量 
激光与光电子学进展
2022, 59(22): 2200001
作者单位
摘要
1 天津大学微电子学院,天津 300072
2 天津大学智能与计算学部,天津 300072
3 天津市成像与感知微电子技术重点实验室,天津 300072
人工神经网络在各类激光技术中有着广泛应用,但是传统的流水展开架构加速器无法处理激光焊接参数提取、激光诱导击穿光谱分析等计算任务所需的多种反向传播(BP)神经网络。本课题组基于Xilinx PYNQ-Z2开发平台设计并实现了一种面向激光焊接技术的BP神经网络可配置型计算加速器架构。采用可配置架构设计和复用运算单元互连的方式,硬件电路可拟合成多种BP网络结构,加速器具有灵活的可配置性;同时,采用基于多级缓存结构的数据读取方法,解决了加速器运算阵列在读入数据时因多次访问片外存储器而导致的读取速度的瓶颈。基于实际激光焊接参数数据集的计算结果表明,所设计的加速器可以高效地加速具有多种神经元数量的BP神经网络。与嵌入式处理平台相比,加速器的典型网络运算性能平均有10.5倍的提升,神经元数目超过100的大型网络运算性能有56.4倍的提升,并且处理速度优于改进前于同一平台实现的普通加速器。
机器视觉 工业光学计量 BP神经网络 人工神经网络加速器 现场可编程门阵列 
激光与光电子学进展
2022, 59(2): 0214001
Author Affiliations
Abstract
1 Wyant College of Optical Sciences, University of Arizona, 1630 E. University Blvd., Tucson, AZ 85721, USA
2 Department of Astronomy and Steward Observatory, University of Arizona, 933 N. Cherry Ave., Tucson, AZ 85721, USA
3 Large Binocular Telescope Observatory, University of Arizona, 933 N. Cherry Ave., Tucson, AZ 85721, USA
4 School of Mechanical and Automotive Engineering, Xiamen University of Technology, Xiamen 361024, China
5 National Synchrotron Light Source II (NSLS-II), Brookhaven National Laboratory, PO Box 5000, Upton, New York 11973, USA
Significant optical engineering advances at the University of Arizona are being made for design, fabrication, and construction of next generation astronomical telescopes. This summary review paper focuses on the technological advances in three key areas. First is the optical fabrication technique used for constructing next-generation telescope mirrors. Advances in ground-based telescope control and instrumentation comprise the second area of development. This includes active alignment of the laser truss-based Large Binocular Telescope (LBT) prime focus camera, the new MOBIUS modular cross-dispersion spectroscopy unit used at the prime focal plane of the LBT, and topological pupil segment optimization. Lastly, future space telescope concepts and enabling technologies are discussed. Among these, the Nautilus space observatory requires challenging alignment of segmented multi-order diffractive elements. The OASIS terahertz space telescope presents unique challenges for characterizing the inflatable primary mirror, and the Hyperion space telescope pushes the limits of high spectral resolution, far-UV spectroscopy. The Coronagraphic Debris and Exoplanet Exploring Pioneer (CDEEP) is a Small Satellite (SmallSat) mission concept for high-contrast imaging of circumstellar disks and exoplanets using vector vortex coronagraph. These advances in optical engineering technologies will help mankind to probe, explore, and understand the scientific beauty of our universe.
computer controlled optical surfacing; CCOS multiplexing dwell time optimization optical metrology telescope alignment large binocular telescope MOBIUS pupil segmentation OASIS nautilus hyperion CDEEP vector vortex coronagraph 
Opto-Electronic Advances
2021, 4(6): 06210040
作者单位
摘要
中国计量科学研究院 光学与激光计量研究所,北京 100029
在已有的紫外、可见和近红外波段的光谱辐射亮度国家基准的基础上,将光谱辐射亮度的测量范围向红外波段扩展,建立2 μm~14 μm红外光谱辐射亮度计量基准装置,可为遥感对地观测、气候变化、目标识别、材料发射率测量等领域的红外光谱辐射定标提供技术支撑。针对红外光谱辐射亮度测量中的温度均匀性和源尺寸效应进行研究,通过定制光阑或限制所用腔口位置实现了温度均匀性的提升;采用光学仿真、增加光阑和简化光路等方法进行了系统源尺寸效应的分析和抑制,有效地降低了源尺寸效应的不确定度。下一步将对系统的非线性效应等参数进行研究,并对整套系统的不确定度进行评估。
光学计量 红外光谱辐射亮度 温度均匀性 源尺寸效应 optical metrology infrared spectral radiance temperature uniformity size-of-source effect 
应用光学
2020, 41(4): 737
作者单位
摘要
布鲁克海文国家实验室 国家同步辐射光源-II,美国 纽约州 阿普顿 11973
随着同步辐射光源和自由电子激光器相关技术的发展和光束质量的提升,对用于转递和聚焦光束能量的X光反射镜的指标要求也逐渐提高。为避免引入额外的波前误差,反射镜面形高度误差均方根值的要求已逼近至亚纳米量级。如此苛刻的面形要求对X光反射镜的测量工作带来了极大的困难和挑战。除了在各国同步辐射光源得到广泛使用的长程轮廓仪等基于角度测量的轮廓扫描仪器之外,基于激光干涉仪的拼接干涉技术也发展为测量同步辐射镜的一种有效手段。文中主要介绍了近期笔者等为测量X光反射镜而开发的拼接干涉平台。利用这一测量平台,研究了在不同的拼接参数下的多种拼接模式。着重讲述了其中纯软件拼接模式的基本原理和实际测量。用实测结果与不同测量仪器和不同研究机构的结果进行比对,验证了拼接干涉测量用于检测同步辐射镜的有效性,并展示了此拼接平台的测量表现。根据所得的测量数据看来,使用纯软件拼接模式来测量X光平面反射镜时,测量重复性的均方差值可以达到0.1 nm左右;而测量X光双曲柱面镜时(曲率半径的变化范围为50~130 m),测量重复性的均方差值为0.2~0.3 nm。此结果基本满足平面和接近平面(曲率半径大于50 m)的同步辐射镜常规检测和为确定性加工提供面形反馈的需要。
高精度光学测量 X光反射镜测量 同步辐射镜检测 拼接干涉术 high-precision optical metrology X-ray mirror metrology synchrotron mirror inspection stitching interferometry 
红外与激光工程
2020, 49(3): 0303012
作者单位
摘要
天津大学精密仪器与光电子工程学院精密测试技术及仪器国家重点实验室, 天津 300072
针对室内空间测量定位系统(wMPS)交会测量模型将发射站扫描激光面视为理想平面的现状,研究了一种基于高精度转台的激光面面型视觉评估方法。根据评估结果引入线性折面判断机制,优化重建了wMPS扫描激光面数学模型,以减小交会测量模型中的系统误差。结合大空间高精度坐标场对新模型进行了评估。结果表明,所研究模型对实际光面的拟合效果较好,有助于提升wMPS的测量精度。
机器视觉 工业光学测量 大尺寸测量 室内空间测量定位系统 激光面模型 
光学学报
2019, 39(3): 0315002
作者单位
摘要
中国计量大学 计量测试工程学院,浙江 杭州 310018
法布里珀罗(F-P)标准具间隔d的高准确度测量对干涉测量结果具有非常重要的影响。论文基于F-P干涉成像图片信息, 结合峰位坐标局域细分原理和圆方程回归, 尤其应用了一种新型的虚拟面阵像元细分和信号平滑化技术, 准确地求出干涉图像各同心圆环直径Di, 实现干涉级次整数部分k0和小数部分ε的准确计算, 完成F-P间隔d的三波长小数重合法测定。实验对比分析了细分和非细分方式对测量结果的影响, 测得细分方式下的d=(2 009.961 91±0.000 06) μm, d的不确定度粗估值(Uε/k0)=9.8×10-7。实验验证了像元细分方法的有效性, 为提高间隔d的测量准确度提供了有效的途径和方法。
光学计量与仪器 虚拟面阵像元细分 改进小数重合法 F-P标准具间隔 峰位坐标回归细分 optical metrology and instrument virtual plane pixel subdivision excess fraction method inner interval of F-P etalon peak position coordinate regression subdivision 
应用光学
2019, 40(1): 99

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