1 电子科技大学国家电磁辐射控制材料工程技术研究中心, 四川 成都 611731
2 电子科技大学电子科学与工程学院, 四川 成都 611731
硅基光波导移相器是硅基光电子系统的重要组成部分。透明导电氧化物(TCO)薄膜的介电常数受栅极电压作用会产生调谐,有望应用于下一代高速、低插入损耗且兼容CMOS的硅基光波导移相器中。TCO较高的光吸收系数限制了其在移相器中的应用。提出了一种基于高迁移率的透明导电氧化物的低插入损耗硅基光波导移相器,并证明了TCO材料迁移率与其损耗密切相关。通过理论计算和数值仿真,设计了一种基于高迁移率氧化镉(CdO)材料(μ=300 cm
2·V
-1·s
-1)的硅基光波导移相器。所得器件在1550 nm波长实现π相移时,器件长度为127 μm,插入损耗为1.4 dB,调制带宽可达到300 GHz。为发展高速硅基光波导移相器件提供了新思路。
光学器件 移相器 电光效应 透明导电氧化物 激光与光电子学进展
2019, 56(15): 152302
Author Affiliations
Abstract
1 Institute of Materials Research & Engineering, Agency for Science, Technology and Research (A*STAR), 2 Fusionopolis Way, Singa-pore 138634, Singapore
2 Department of Electrical and Computer Engineering, National University of Singapore, Singapore 117576, Singapore
Metasurfaces, two-dimensional equivalents of metamaterials, are engineered surfaces consisting of deep subwavelength features that have full control of the electromagnetic waves. Metasurfaces are not only being applied to the current devices throughout the electromagnetic spectrum from microwave to optics but also inspiring many new thrilling applications such as programmable on-demand optics and photonics in future. In order to overcome the limits imposed by passive metasurfaces, extensive researches have been put on utilizing different materials and mechanisms to design active metasurfaces. In this paper, we review the recent progress in tunable and reconfigurable metasurfaces and metadevices through the different active materials deployed together with the different control mechanisms including electrical, thermal, optical, mechanical, and magnetic, and provide the perspective for their future development for applications.
tunable reconfigurable metasurface metamaterial transparent conductive oxides ferroelectrics graphene phase change material semiconductor micro-nanoelectromechanical systems Opto-Electronic Advances
2018, 1(5): 180009
