Author Affiliations
Abstract
1 State Key Laboratory of Modern Optical Instrumentation, College of Information Science and Electronic Engineering, Zhejiang University, Hangzhou 310007, China
2 Institute of Microelectronics, Chinese Academic Society, Beijing 100029, China
3 Key Laboratory of 3D Micro/Nano Fabrication and Characterization of Zhejiang Province, School of Engineering, Westlake University, Hangzhou 310007, China
4 Institute of Advanced Technology, Westlake Institute for Advanced Study, Hangzhou 310023, China
As a promising spectral window for optical communication and sensing, it is of great significance to realize on-chip devices at the 2 µm waveband. The development of the 2 µm silicon photonic platform mainly depends on the performance of passive devices. In this work, the passive devices were fabricated in the silicon photonic multi-project wafer process. The designed micro-ring resonator with a 0.6 µm wide silicon ridge waveguide based on a 220 nm silicon-on-insulator platform achieves a high intrinsic quality factor of 3.0×105. The propagation loss is calculated as 1.62 dB/cm. In addition, the waveguide crossing, multimode interferometer, and Mach–Zehnder interferometer were demonstrated at 2 µm with good performances.
silicon photonics integrated photonics grating coupler multimode interferometer waveguide crossing 
Chinese Optics Letters
2021, 19(7): 071301

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