作者单位
摘要
1 山东省科技服务发展推进中心,济南 250101
2 山东大学机械工程学院,济南 250061
作为典型的硬脆材料,氧化镓晶体(β-Ga2O3)加工时易裂解。金刚石线锯是生产β-Ga2O3晶片的主要方式,切片加工过程中会在晶片表面产生微裂纹损伤层,应力作用下微裂纹会发生扩展,导致材料破碎和断裂。本文建立了金刚石线锯多线切割β-Ga2O3(010)晶面的有限元模型,研究了锯切过程中机械应力、热应力和热力耦合应力的分布变化规律,分析了锯丝速度、进给速度和恒速比下不同参数组合对热力耦合应力的影响。结果表明,锯切过程中锯切热产生的热应力占据热力耦合应力的主导地位,锯切力引起的机械应力占比较小,但机械应力会影响热力耦合应力的分布情况,锯丝速度和进给速度的增加会引起热力耦合应力的增加。
金刚石线锯 有限元分析 热力耦合应力 机械应力 热应力 β-Ga2O3 β-Ga2O3 diamond wire saw finite element analysis thermal-mechanical coupling stress mechanical stress thermal stress 
人工晶体学报
2023, 52(8): 1378
作者单位
摘要
北京石油化工学院新材料与化工学院, 北京 102617
本文采用基于密度泛函理论的第一性原理计算了不同Al掺杂浓度β-Ga2O3(即(AlxGa1-x)2O3)的晶体结构、电荷密度分布、能带结构、态密度和光学性质, 并对本征β-Ga2O3和不同Al掺杂浓度的β-Ga2O3的计算结果进行了分析对比。结果表明, 随着Al掺杂浓度的增加, (AlxGa1-x)2O3的晶格常数和键长均单调减小, 而带隙逐渐增大。β-Ga2O3导带底上方存在主要由Ga 4s和Al 3p轨道组成的中间带, Al掺杂在此中间带引入杂质能级, 从而导致带隙增加。同时, Al的引入使态密度向高能侧偏移了近3 eV, 也导致了带隙的增加。根据光学性质的计算结果, 在掺杂Al后, 介电函数的虚部和吸收系数均观察到明显的蓝移现象。这是由价带顶中的O 2p态和导带底中的Ga 4s态之间的跃迁产生的。并且, 随着Al掺杂浓度的增加, 蓝移现象加剧。本文研究可为基于(AlxGa1-x)2O3光电器件的设计提供思路和理论指导。
第一性原理 掺杂 Al掺杂β-Ga2O3 能带结构 电子结构 光学性质 first-principle doping Al-doped β-Ga2O3 band structure electronic structure optical property 
人工晶体学报
2023, 52(9): 1674
李信儒 1,*侯童 1马旭 1王佩 1[ ... ]陶绪堂 1
作者单位
摘要
1 山东大学, 新一代半导体材料研究院, 晶体材料国家重点实验室, 济南 250100
2 山东工业技术研究院, 济南 250100
本文研究了斜切角的引入对β-Ga2O3(100)面衬底加工的影响, 分析了斜切角分别为0°、1°、6°时, (100)面衬底在加工过程中的形貌变化及不同抛光参数对衬底抛光的影响。实验结果表明, 随着斜切角的增大, (100)面衬底在加工过程中的解理损伤问题得以改善, 加工后表面粗糙度降低, 材料去除方式出现了脆性去除-脆塑性混合去除-塑性去除的转变。较小的抛光压力可以有效减少解理损伤, 改善表面质量。斜切角为6°时的(100)面衬底抛光效率高, 抛光后表面粗糙度可达到Ra≤0.2 nm。
解理 斜切角 抛光 表面粗糙度 β-Ga2O3 β-Ga2O3 cleavage miscut-angle polishing surface roughness 
人工晶体学报
2023, 52(9): 1570
作者单位
摘要
南京大学电子科学与工程学院, 南京 210023
本文使用金属有机物化学气相沉积(MOCVD)法在不同切割角的c面蓝宝石衬底上外延氧化镓(β-Ga2O3)单晶薄膜, 揭示了衬底切割角对外延薄膜晶体质量的影响规律。研究表明, 当衬底切割角为6°时, β-Ga2O3外延膜具有较小的X射线摇摆曲线半峰全宽(1.10°)和最小的表面粗糙度(7.7 nm)。在此基础上, 采用光刻、显影、电子束蒸发及剥离工艺制备了金属-半导体-金属结构的日盲紫外光电探测器, 器件的光暗电流比为6.2×106, 248 nm处的峰值响应度为87.12 A/W, 比探测率为3.5×1015 Jones, 带外抑制比为2.36×104, 响应时间为226.2 μs。
超宽禁带半导体 氧化镓薄膜 金属有机物化学气相沉积 日盲紫外光电探测器 切割角 外延 ultra-wide bandgap semiconductor β-Ga2O3 film metal organic chemical vapor deposition solar-blind ultraviolet photodetector off-cut angle epitaxy 
人工晶体学报
2023, 52(6): 1007
Author Affiliations
Abstract
School of Microelectronics, University of Science and Technology of China, Hefei 230026, China
We demonstrate superb large-area vertical β-Ga2O3 SBDs with a Schottky contact area of 1 × 1 mm2 and obtain a high-efficiency DC–DC converter based on the device. The β-Ga2O3 SBD can obtain a forward current of 8 A with a forward voltage of 5 V, and has a reverse breakdown voltage of 612 V. The forward turn-on voltage (VF) and the on-resistance (Ron) are 1.17 V and 0.46 Ω, respectively. The conversion efficiency of the β-Ga2O3 SBD-based DC–DC converter is 95.81%. This work indicates the great potential of Ga2O3 SBDs and relevant circuits in power electronic applications.
β-Ga2O3 SBD DC–DC converter 
Journal of Semiconductors
2023, 44(7): 072805
Author Affiliations
Abstract
School of Microelectronics, University of Science and Technology of China, Hefei 230026, China
The self-heating effect severely limits device performance and reliability. Although some studies have revealed the heat distribution of β-Ga2O3 MOSFETs under biases, those devices all have small areas and have difficulty reflecting practical conditions. This work demonstrated a multi-finger β-Ga2O3 MOSFET with a maximum drain current of 0.5 A. Electrical characteristics were measured, and the heat dissipation of the device was investigated through infrared images. The relationship between device temperature and time/bias is analyzed.
β-Ga2O3 MOSFET multi-finger self-heating effect 
Journal of Semiconductors
2023, 44(7): 072804
Author Affiliations
Abstract
1 State Key Laboratory of Electronic Thin Films and Integrated Devices, University of Electronic Science and Technology of China, Chengdu 610054, China
2 School of Microelectronics, University of Science and Technology of China, Hefei 230026, China
A NiO/β-Ga2O3 heterojunction-gate field effect transistor (HJ-FET) is fabricated and its instability mechanisms are experimentally investigated under different gate stress voltage (VG,s) and stress times (ts). Two different degradation mechanisms of the devices under negative bias stress (NBS) are identified. At low VG,s for a short ts, NiO bulk traps trapping/de-trapping electrons are responsible for decrease/recovery of the leakage current, respectively. At higher VG,s or long ts, the device transfer characteristic curves and threshold voltage (VTH) are almost permanently negatively shifted. This is because the interface dipoles are almost permanently ionized and neutralize the ionized charges in the space charge region (SCR) across the heterojunction interface, resulting in a narrowing SCR. This provides an important theoretical guide to study the reliability of NiO/β-Ga2O3 heterojunction devices in power electronic applications.
NiO/β-Ga2O3 heterojunction FET NBS instability bulk traps interface dipoles 
Journal of Semiconductors
2023, 44(7): 072803
Author Affiliations
Abstract
National Key Laboratory of Application Specific Integrated Circuit (ASIC), Hebei Semiconductor Research Institute, Shijiazhuang 050051, China
This work demonstrates high-performance NiO/β-Ga2O3 vertical heterojunction diodes (HJDs) with double-layer junction termination extension (DL-JTE) consisting of two p-typed NiO layers with varied lengths. The bottom 60-nm p-NiO layer fully covers the β-Ga2O3 wafer, while the geometry of the upper 60-nm p-NiO layer is 10 μm larger than the square anode electrode. Compared with a single-layer JTE, the electric field concentration is inhibited by double-layer JTE structure effectively, resulting in the breakdown voltage being improved from 2020 to 2830 V. Moreover, double p-typed NiO layers allow more holes into the Ga2O3 drift layer to reduce drift resistance. The specific on-resistance is reduced from 1.93 to 1.34 mΩ·cm2. The device with DL-JTE shows a power figure-of-merit (PFOM) of 5.98 GW/cm2, which is 2.8 times larger than that of the conventional single-layer JTE structure. These results indicate that the double-layer JTE structure provides a viable way of fabricating high-performance Ga2O3 HJDs.
β-Ga2O3 breakdown voltage heterojunction diode (HJD) junction termination extension (JTE) power figure-of-merit (PFOM) 
Journal of Semiconductors
2023, 44(7): 072802
Author Affiliations
Abstract
1 Department of Intelligent Mechatronics Engineering, Sejong University, Seoul 05006, Republic of Korea
2 Laboratory of Semiconducting and Metallic Materials (LMSM), University of Biskra, Biskra 07000, Algeria
3 Research and Development, Powercubesemi Inc., Sujeong-gu, Seongnam-si, Gyeonggi-do 13449, Republic of Korea
4 Department of Semiconductor Systems Engineering, Sejong University, Seoul 05006, Republic of Korea
In this work, W/β-Ga2O3 Schottky barrier diodes, prepared using a confined magnetic field-based sputtering method, were analyzed at different operation temperatures. Firstly, Schottky barrier height increased with increasing temperature from 100 to 300 K and reached 1.03 eV at room temperature. The ideality factor decreased with increasing temperature and it was higher than 2 at 100 K. This apparent high value was related to the tunneling effect. Secondly, the series and on-resistances decreased with increasing operation temperature. Finally, the interfacial dislocation was extracted from the tunneling current. A high dislocation density was found, which indicates the domination of tunneling through dislocation in the transport mechanism. These findings are evidently helpful in designing better performance devices.
β-Ga2O3 SBD SBD paramatters tungsten low temperature tunneling via dislocation 
Journal of Semiconductors
2023, 44(7): 072801
Author Affiliations
Abstract
1 Key Laboratory of UV Light Emitting Materials and Technology, Ministry of Education, Northeast Normal University, Changchun 130024, China
2 Department of Electrical Engineering, The City College of New York, New York, NY 10031, USA
Ultrawide band gap semiconductors are promising solar-blind ultraviolet (UV) photodetector materials due to their suitable bandgap, strong absorption and high sensitivity. Here, β-Ga2O3 microwires with high crystal quality and large size were grown by the chemical vapor deposition (CVD) method. The microwires reach up to 1 cm in length and were single crystalline with low defect density. Owing to its high crystal quality, a metal–semiconductor–metal photodetector fabricated from a Ga2O3 microwire showed a responsivity of 1.2 A/W at 240 nm with an ultrahigh UV/visible rejection ratio (Rpeak/R400 nm) of 5.8 × 105, indicating that the device has excellent spectral selectivity. In addition, no obvious persistent photoconductivity was observed in the test. The rise and decay time constants of the device were 0.13 and 0.14 s, respectively. This work not only provides a growth method for high-quality Ga2O3 microwires, but also demonstrates the excellent performance of Ga2O3 microwires in solar-blind ultraviolet detection.
solar-blind photodetector β-Ga2O3 microwire 
Journal of Semiconductors
2023, 44(6): 062806

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