为实现对大尺寸光学材料及系统元件的高精度对准测试, 设计了一种新型Φ200 mm口径长焦距准直干涉测试装置。该装置以球面标准镜作为参考镜, 结合斐索型透射式干涉机制和长焦距准直测试原理对凹球面大曲率半径光学元件进行面形精度检测, 最大测试口径为Φ226.67 mm, 且球面标准镜和球面标准反射镜同轴共球心, 大幅度减小了测试空腔距离。结果表明, 该系统空腔测试精度PV值为0097λ@6328 nm, RMS值为0013λ@6328 nm, 系统重复稳定性优于λ/500@6328 nm, 可实现曲率半径为7 500~8 500 mm测试, 且大曲率半径测试误差小于1/1 000。

针对传统方法抛光高功率激光实验中使用的长焦距列阵透镜单元遇到的检测困难、一致性差等问题，提出了采用环形抛光的新方法。对环形抛光系统的理论分析表明，抛光盘面形可以稳定在球面状态。利用这种特性，环形抛光法可以抛光小曲率球面。阐述了抛光盘面形的调节方法。利用0.69 m 环形抛光机对口径45 mm、曲率半径57207 mm 的列阵透镜单元进行了抛光，结果表明面形精度和一致性均优于平面摆动式抛光法。最后对环形抛光机可抛光的球面曲率半径范围进行了探讨，发现盘面尺寸越小球面抛光能力越强，直径0.8 m 的盘面可抛光的曲率半径可低至10 m。

针对传统方法抛光高功率激光实验中使用的长焦距列阵透镜单元遇到的检测困难、一致性差等问题，提出了采用环形抛光的新方法。对环形抛光系统的理论分析表明，抛光盘面形可以稳定在球面状态。利用这种特性，环形抛光法可以抛光小曲率球面。阐述了抛光盘面形的调节方法。利用0.69 m 环形抛光机对口径45 mm、曲率半径57207 mm 的列阵透镜单元进行了抛光，结果表明面形精度和一致性均优于平面摆动式抛光法。最后对环形抛光机可抛光的球面曲率半径范围进行了探讨，发现盘面尺寸越小球面抛光能力越强，直径0.8 m 的盘面可抛光的曲率半径可低至10 m。

Aiming at the problems such as difficult to mearsure and bad consistency of the surfaces in polishing long-focus lens array elements by conventional method, the new way using continuous polishing machine is proposed. According to the theoretical research of the continuous polishing system, the surface of the polishing pad can keep spherical. The workpieces with small curvature spherical surfaces can be polished with the character. The adjusting methods of the polishing pad surface curvature are elaborated. According to the experiments of polishing lens array elements with aperture of 45 mm and curvature radius of 57207 mm in 0.69 m continuous polishing machine, the element surface accuracy and consistency are both better than using conventional oscillating polishing method. At last, the range of the curvature radius that can be polished in the continuous polishing machine is discussed and find that the smaller the polishing pad is, the stronger the ability of polishing spherical surface is. The radius of curvature which is polished in 0.8 m diameter can be as amall as 10 m.

结合超精密制造技术，讨论了轮廓仪测量大曲率半径表面形貌存在的精度缺陷。提出了利用NIKON Autocollimator 6D自准直仪辅助Form Talysurf PGI 1250A以提高轮廓仪测量精度的改进方法。当自准直仪的光轴与样品顶点的法线共轴时，旋转样品其顶点的法线方向不变，因此自准直仪的反射像位置也不会变，并且自准直仪有很高的精度，从而可将其用于寻找顶点。基于相关参数对提高轮廓仪测量精度进行了理论计算和Zemax模拟。搭建实验装置对不同曲率半径的样品进行测量，与改进前实验结果进行对比，证明了轮廓仪测量精度提高到原来的2～4倍，适用于测量大曲率半径表面形貌，验证了改进方法的合理性和有效性。

The long trace profiler (LTP) is proposed to measure radius of curvature (R) and surface figure of a longradius spherical surface in an optical shop. Equipped with a motorized rotary stage and a two-dimensional tilt stage, the LTP scans the full aperture and calculates the absolute radius of curvature of each scanning line based on the least square method. Nonlinear error and manufacture error difference between center and the edge are obtained by comparing R results. The R-limit is validated and expressed as D/R, where D is the aperture of the mirror under test. A full-aperture three-dimensional figure is also reconstructed based on triangle interpolation.