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电压调制ZnO紫外探测器光响应截止波长的研究

Spectral Response Cutoff Wavelength of ZnO Ultraviolet Photodetector Modulated by Bias Voltage

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摘要

通过射频磁控溅射技术,成功制备了具有金属-半导体-金属(MSM)结构的ZnO紫外光电探测器。研究了外加偏压对探测器响应度和截止波长的影响。随着偏压的增大,器件的响应度逐渐增加并且趋于饱和,探测器的响应截止波长红移了12 nm。这是电场引起的耗尽层的展宽以及带隙倾斜造成的。提出了一种利用外加偏压控制探测器截止波长的有效方法,该方法对紫外光电探测器的进一步研究和应用具有重要意义。

Abstract

A ZnO ultraviolet photodetector with a metal-semiconductor-metal (MSM) structure was successfully prepared by the radio frequency magnetron sputtering technology. The bias voltage dependence of the responsivity and cutoff wavelength of the detector is studied. With the increase of bias voltage, the responsivity of the detector gradually increases and tends to saturate and the response cutoff wavelength of the detector is redshifted by 12 nm. This is attributed to the broadening of the depletion layer and the tilt of the bandgap caused by the field. In this work, an effective method is proposed to control the cutoff wavelength of the detector by an external bias voltage, which is of great significance to the further investigation and application of ultraviolet photodetectors.

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中图分类号:O472

DOI:10.3788/AOS202040.2004001

所属栏目:探测器

基金项目:国家自然科学基金、吉林省教育厅“十三五”科研项目、吉林省科技发展计划项目;

收稿日期:2020-05-27

修改稿日期:2020-07-06

网络出版日期:2020-10-01

作者单位    点击查看

段雨晗:哈尔滨工业大学空间光学工程研究中心, 黑龙江 哈尔滨 150001
丛明煜:哈尔滨工业大学空间光学工程研究中心, 黑龙江 哈尔滨 150001
蒋大勇:长春理工大学材料科学与工程学院, 吉林 长春 130022
梁庆成:长春理工大学材料科学与工程学院, 吉林 长春 130022

联系人作者:丛明煜(myconghit@126.com)

备注:国家自然科学基金、吉林省教育厅“十三五”科研项目、吉林省科技发展计划项目;

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引用该论文

Duan Yuhan,Cong Mingyu,Jiang Dayong,Liang Qingcheng. Spectral Response Cutoff Wavelength of ZnO Ultraviolet Photodetector Modulated by Bias Voltage[J]. Acta Optica Sinica, 2020, 40(20): 2004001

段雨晗,丛明煜,蒋大勇,梁庆成. 电压调制ZnO紫外探测器光响应截止波长的研究[J]. 光学学报, 2020, 40(20): 2004001

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