报导了最新研制的30.4 nm极紫外成像探测器的实验研究结果。该探测器采用了楔条形阳极(WSA)、高增益V型级联微通道板组件、低噪声电子读出系统等先进技术,利用单光子计数成像技术在实验室成功获得了模拟图像。搭建了相应的实验系统,对探测器成像的线性度、空间分辨率、暗计数等性能进行了实验研究。结果表明,该探测器具有45 nm的有效面积,空间分辨率优于100 μm, 暗计数率低[0.4 count/(cm2·s)]、成像线性度好、结构简单等优点。

The experimental result of the newly developed 30.4 nm extreme ultraviolet imaging detector was reported in detail, which adopted wedge strip and zigzag anode (WSA), V-stack high-gain microchannel plate (MCP) components, low-noise electronic readout system, and other advanced techniques. Simulated images were obtained successfully by using the single-photon counting imaging technique in the laboratory. The experimental setup system was established and the detector imaging linearity, resolution, the dark count rates etc are studied. The research shows that the detector has an effective area of 45 mm in diameter, spatial resolution better than 100 μm, and low dark count rates about 0.4 count/(cm2·s), with good image linearity and simple structure.