对研制出的楔条形阳极探测器进行了性能分析与实验测试，分析了引起成像畸变的三个重要因素：到达阳极的电子云半径大小、阳极的电容耦合效应和电子读出电路的性能.电子云半径的过大或过小会相应引起成像的 “S”畸变或调制畸变，电容耦合效应和电路噪音也均会引起成像的畸变.此外，测试了探测器的暗计数率、线性度以及空间分辨率等性能，同时分析了微通道板在光照情况下的增益特性和暗计数的一般特性及其产生原因.测试结果表明探测器的成像畸变很小、线性关系较好，空间分辨率优于150 μm，微通道板的暗计数率低于0.4 count/s*cm2.

报导了最新研制的30.4 nm极紫外成像探测器的实验研究结果。该探测器采用了楔条形阳极(WSA)、高增益V型级联微通道板组件、低噪声电子读出系统等先进技术,利用单光子计数成像技术在实验室成功获得了模拟图像。搭建了相应的实验系统,对探测器成像的线性度、空间分辨率、暗计数等性能进行了实验研究。结果表明,该探测器具有45 nm的有效面积,空间分辨率优于100 μm, 暗计数率低[0.4 count/(cm2·s)]、成像线性度好、结构简单等优点。

Single photon counting imaging technology has been widely used in space environment detection, astronomy observation, nuclear physics, and ultraweak bioluminescence. However, the distortion of the single photon counting image will badly affect the measurement results. Therefore, the correction of distortion for single photon counting image is very significant. Ultraviolet single photon imaging system with wedge and strip anode is introduced and the influence factor leading to image distortion is analyzed. To correct original distorted image, three different image correction methods, namely, the physical correction, the global correction, and the local correction, are applied. In addition, two parameters, i.e., the position index and the linearity index, are defined to evaluate the performance of the three methods. The results suggest that the correction methods can improve the quality of the initial image without losing gray information of each counting light spot. And the local correction can provide the best visual inspections and performance evaluation among the three methods.

分析了楔条形阳极收集器各参量对探测器主要性能的影响,研究了圆形收集器的设计方法,制定并优化了相应的制作工艺.以此为基础,设计和制作了两块有效探测面积Φ 48 mm、周期1.2 mm、绝缘沟道宽度30 μm、电极厚度分别为1 μm和2 μm的圆形收集器.通过对比和分析这两块收集器的电阻和电极电容值以及相应的成像实验,验证了上述研究方法的正确性和"先光刻腐蚀后电镀增厚"工艺方案的可行性.

通过对楔条形阳极探测器位置灵敏坐标计算公式的推导,证明了楔形和条纹分布面积所对应的级数是等差级数.分析了楔形底宽和条纹宽度等差系数这两个设计参量对探测灵敏度的影响.研究了电极电容的电容性耦合效应对位置灵敏的影响,通过对楔条形阳极探测器坐标计算公式的修正,可在不影响分辨率的前提下有效地消除电容性耦合效应所产生的扭曲变形.