为了进一步明确氟化薄膜材料在深紫外-紫外波段(DUV-UV)的光学常数, 研究了深紫外-紫外波段常用的6种大带隙的氟化物薄膜材料, 分别在熔石英(JGS1)基底和氟化镁单晶基底上用热舟蒸发镀制了3种高折射率材料薄膜LaF3,NdF3,GdF3和3种低折射率材料薄膜MgF2,AlF3,Na3AlF6；用商用Lambda900光谱仪测量了它们在190～500 nm范围的透射率光谱曲线；用包络法和迭代算法相结合研究了它们的折射率和消光系数, 由柯西色散公式和指数色散公式对得到的离散折射率和消光系数的值用最小二乘法进行曲线拟合, 得到了6种薄膜材料在所测波段内的折射率和消光系数的色散公式和色散曲线。所得结果与文献报道的MgF2和LaF3的结果相一致, 证明了结果的可靠性。

In order to determine the optical constants of fluoride films in deep ultraviolet (DUV) to ultraviolet (UV), high-refractive-index materials such as LaF3, NdF3, and GdF3, and low-refractive-index materials such as MgF2, AlF3, and Na3AlF6 single thin films are deposited by a resistive-heating boat at different deposition rates and specific substrate temperatures on JGS1 and single crystal MgF2 substrates. Transmittances in 190～500 nm of all fluoride thin films are measured through business spectrometer in the ambient atmosphere. The optical constants of these films are determined from iterative algorithm combined with the envelope method. These dispersive optical constant values are fitted by Cauchy formula and index formula, respectively. The results are consistent with other relevant articles, which testifies the reliability of the results.