光学学报, 2013, 33 (6): 0605002, 网络出版: 2013-05-22
InP基16通道200 GHz 阵列波导光栅的设计和制备
Design and Fabrication of 16 Channel 200 GHz InP Based Array Waveguide Gratings
光学器件 磷化铟 阵列波导光栅 波分复用器 单片光子集成 optical devices InP array waveguide grating wavelength division multiplexer monolithic photonic integrated circuits
摘要
设计制作了一种适合单片光子集成回路的InP基16通道，200 GHz通道间隔的阵列波导光栅（AWG）器件。采用偏振无关的深脊型波导以减小器件尺寸，提高光电子芯片的集成度。利用金属有机化学气相沉积（MOCVD），光刻及感应耦合反应离子束（ICP）刻蚀技术，成功研制出芯片样品。测试结果显示，器件插入损耗约-10 dB，相邻通道串扰小于-15 dB。
Abstract
A 16-channel InP based array waveguide grating (AWG) with 200 GHz channel spacing is designed and fabricated for monolithic photonic integrated circuits. Polarization independent deep ridge waveguide is applied to reduce chip size and improve the integration level. By using the technologies of metal organic chemical vapor deposition (MOCVD), lithography and induced coupler plasma etching (ICP), the chip is fabricated in our laboratory successfully. The test results show that the insertion loss is about -10 dB, crosstalk is less than -15 dB.
赵建宜, 陈鑫, 钱坤, 张玓, 王磊, 周宁, 黄晓东, 刘文. InP基16通道200 GHz 阵列波导光栅的设计和制备[J]. 光学学报, 2013, 33(6): 0605002. Zhao Jianyi, Chen Xin, Qian Kun, Zhang Di, Wang Lei, Zhou Ning, Huang Xiaodong, Liu Wen. Design and Fabrication of 16 Channel 200 GHz InP Based Array Waveguide Gratings[J]. Acta Optica Sinica, 2013, 33(6): 0605002.
PDF全文
