InP基16通道200 GHz 阵列波导光栅的设计和制备
[1] R. Nagarajan, C. H. Joyner, R. P. Schneider et al.. Large-scale photonic integrated circuits [J]. IEEE J. Sel. Top. Quantum Electron., 2005, 11(1): 50~65
[2] S. T. Ho, Y. Y. Huang, J. Ma. InP photonic integrated circuit and DWDM-on-chip technology [C]. IEEE Avionics, Fiber-Optics and Photonics Technology Conference, 2007. 56~57
[3] P. Ecans, S. Corzine, M. Kato. Current view of large scale photonic integrated circuits on indium phosphide[C]. Optical Fibre Communication, 2010. OWD3
[4] J. Rahn, M. Kato, J. Pleumeekers. 10 channels 45.6 Gb/s per channel, polarization-multiplexed DQPSK, InP receiver photonic integrated circuit [J]. IEEE J. Lightwave. Technol., 2011, 29(4): 386~395
[5] S. Muthy, M. Kato, R. Nagarajan et al.. Large scale photonic integrated circuit transmitters with monolithically integrated semiconductor optical amplifiers [C]. Optical Fibre Communication, 2008. OWE1
[6] H. Bissessur, P. PagnodRossiaux, R. Mestric et al.. Extremely small polarization independent phased array demultiplexers on InP [J]. IEEE Photon. Technol. Lett., 1996, 8(4): 544~546
[7] S. H. Wemple, M. DiDomentico. Behavior of electronic dielectric constant covalent and Ionic materials [J]. Phys. Rev. B, 1971, 3(4): 1338~1351
[8] J. Minch, S. H. Park, T. Keating et al.. Theory and experiment of In1-xGaxAsyP1-y and In1-x-yGaxAlyAs long-wavelength strained quantum-well lasers [J]. IEEE J. Quantum Electron., 1999, 35(50): 711~782
[9] 孙淼, 时尧成, 戴道锌 等. 减小SiO2光波导表面粗糙度的ICP干法刻蚀工艺研究[J]. 光学仪器, 2006, 29(1): 71~74
Sun Miao, Shi Yaochen, Dai Daoxin et al.. Improvement of ICP etching process for reducing the surface roughness of SiO2 optical waveguides [J]. Optical Instruments, 2006, 29(1): 71~74
[10] 陈少武, 徐学俊, 屠晓光. 硅基微纳光波导损耗特性的表征技术[J]. 光学学报, 2009, 29(s1): 134~138
[11] 安俊明, 夏君旨, 李健 等. 硅基二氧化硅阵列波导光栅相位误差数值分析[J]. 半导体学报, 2005, 26(13): 220~224
An Junming, Xia Junzhi, Li Jian et al.. Numerical analysis for phase error of silica based arrayed waveguide grating [J]. Chinese J. Semiconductor, 2005, 26(13): 220~224
[12] 王文敏, 刘文, 宋琼辉. 低热应力热稳定曲线型阵列波导光栅复用器[J]. 光子学报, 2011, 40(12): 1780~1784
[13] 朗婷婷, 林旭峰, 何建军. 硅基二氧化硅阵列波导光栅制作工艺的研究[J]. 光学学报, 2011, 31(2): 0213003
赵建宜, 陈鑫, 钱坤, 张玓, 王磊, 周宁, 黄晓东, 刘文. InP基16通道200 GHz 阵列波导光栅的设计和制备[J]. 光学学报, 2013, 33(6): 0605002. Zhao Jianyi, Chen Xin, Qian Kun, Zhang Di, Wang Lei, Zhou Ning, Huang Xiaodong, Liu Wen. Design and Fabrication of 16 Channel 200 GHz InP Based Array Waveguide Gratings[J]. Acta Optica Sinica, 2013, 33(6): 0605002.