线偏振光和圆偏振光下ZrO2和Al2O3陶瓷材料的飞秒激光烧蚀性能

将不同脉冲数的飞秒激光作用于陶瓷材料表面, 研究了线偏振和圆偏振激光对氧化锆和氧化铝陶瓷材料烧蚀阈值的影响, 利用光学显微镜和扫描电子显微镜分析了烧蚀坑表面形貌, 利用激光扫描共聚焦显微镜确定了烧蚀坑深度.结果表明：两种材料在线偏振光下的饱和烧蚀阈值均小于在圆偏振光下的值; 当偏振态相同时, 氧化锆饱和烧蚀阈值小于氧化铝.随脉冲数增加, 线偏振和圆偏振光下氧化锆烧蚀坑表面结构均由无序向有序发展, 出现了周期性环形波纹结构和纳米孔洞阵列.与线偏振光相比, 圆偏振光对烧蚀坑深度的作用更明显, 且烧蚀坑表面形貌对能量密度变化比较敏感, 更容易产生周期性结构.

Abstract

The effects of linearly polarized and circularly polarized femtosecond laser on the ablation threshold of ZrO2 and Al2O3 ceramics at different pulse numbers were investigated. The surface morphology of the ablated craters was analyzed by optical microscopy and scanning electron microscopy and the depth of the ablated craters was measured by laser scanning confocal microscopy. The results show that the saturation ablation threshold of the two materials at linearly polarized light is smaller than that of circularly polarized light. The saturation ablation threshold of ZrO2 is smaller than that of Al2O3 at the same polarization state. With the increase of pulse numbers, the surface structures of ZrO2 ablation craters develop from disorder to order, and periodic layer annular ripple structures and nanohole arrays are observed at linear and circular polarized light. Compared with linearly polarized light, the effect of circularly polarized light on the depth of ablated craters is stronger, and surface morphology is more sensitive to the change of laser fluence, at the same time, the periodic structures are more obvious.

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张军战, 张媛敏, 刘永胜, 张颖, 刘乾. 线偏振光和圆偏振光下ZrO₂和Al₂O₃陶瓷材料的飞秒激光烧蚀性能[J]. 光子学报, 2018, 47(6): 0614003. ZHANG Jun-zhan, ZHANG Yuan-min, LIU Yong-sheng, ZHANG Ying, LIU Qian. Femtosecond Laser Ablation Properties of ZrO₂ and Al₂O₃ Ceramics at Linear and Circular Polarized Light[J]. ACTA PHOTONICA SINICA, 2018, 47(6): 0614003.

线偏振光和圆偏振光下ZrO₂和Al₂O₃陶瓷材料的飞秒激光烧蚀性能

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