平面光栅效率仪测量过程分析与结果修正

为了获得准确的平面光栅衍射效率测量结果，需要对平面光栅效率仪的测量过程进行分析。通过对测量过程中影响测量结果的光栅出射光谱增宽和衍射光束截面变化等主要因素进行分析，给出了两者关于入射波长和光栅刻线密度的关系式。运用多元线性回归分析的数学方法，在大量实验数据的基础上，建立了回归修正公式，分别从理论和实验上验证了修正公式的准确性和可靠性，并将此修正公式编入测量程序，可以在测量结束的同时自动修正测量结果。结果表明，经过修正后的测量值更加接近理论值，偏差均在±2%以内，可以实现对光栅衍射效率的准确测量。该方法不仅实时性强，而且不必对仪器部件做出任何改动，满足仪器操作简单、测量快速准确的要求。

Abstract

In order to get precise testing results from the instrument used for measuring the diffraction efficiency of plane grating, the analysis has been done on the instrument. Through analyzing the main factors that spectral broadening of exit beam and cross-section change of diffracted beam, which influence the testing results during measurement, the relation between wavelength and groove density of them is given. Based on a large number of experimental data, multiple linear regression analysis is used to establish regression equation based on two primary factors which influence the testing result during the testing process, and the equation is proved to be exact and credible not only in theory but also in experiment. Furthermore, the equation has been programmed in the testing programming, and it can correct the testing results automatically after finishing the test. By the results, the testing results which have been corrected are closer to the theoretical value, and the difference is less than ±2%, which prove that the method can be used to measure the diffraction efficiency of the plane grating. This method is strongly real-time, and any change is not necessary to the components of the instrument, which can satisfy the requirements of simple operation, testing speediness and preciseness.

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