激光技术, 2011, 35 (1): 36, 网络出版: 2011-08-30
157 nm激光微加工过程中激光参量对刻蚀性能的影响
Influence of laser parameters on etching performance during 157nm laser micromachining
引用该论文
戴玉堂, 崔健磊, 徐刚, 白帆. 157 nm激光微加工过程中激光参量对刻蚀性能的影响[J]. 激光技术, 2011, 35(1): 36.
DAI Yu-tang, CUI Jian-lei, XU Gang, BAI Fan. Influence of laser parameters on etching performance during 157nm laser micromachining[J]. Laser Technology, 2011, 35(1): 36.
戴玉堂, 崔健磊, 徐刚, 白帆. 157 nm激光微加工过程中激光参量对刻蚀性能的影响[J]. 激光技术, 2011, 35(1): 36. DAI Yu-tang, CUI Jian-lei, XU Gang, BAI Fan. Influence of laser parameters on etching performance during 157nm laser micromachining[J]. Laser Technology, 2011, 35(1): 36.
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