Low-cost method of fabricating large-aperture, high efficiency, Fresnel diffractive membrane optic using a modified moiré technique Download: 1107次
The development of space remote sensing technology in national defense and civilian fields urgently requires higher resolution and sensitivity, which means increasing optical system aperture. Today, most conventional space telescopes are based on reflective systems. However, fabricating a high precision large-aperture mirror is extremely difficult. Furthermore, the heavy weight of the system based on large-aperture elements makes it a significant challenge for rocket transportation. New optical image technologies are studied worldwide to overcome these difficulties[1
Diffraction efficiency is a vital factor in an optical system. Hence, multi-level structures are made to increase the efficiency of diffractive optics. However, the misalignment of different levels significantly decreases the efficiency. Fabricating large-aperture multi-level elements with small features has been a huge challenge considering its generally high cost. The LLNL has fabricated the multi-level optics by laser writer capable of overlay writing. The laser writer can write patterns with features as small as 1 μm, and a 0.4 μm registration accuracy was practically achieved[11]. Such extremely strict registration precision corresponds to a relatively high equipment cost.
To lower the cost, the conventional UV lithography based on the moiré fringe alignment method is a favorable choice. In recent years, the linear-grating phase demodulation approach[12] is widely used in optical alignment. However, the relatively complicated system should be carefully adjusted to obtain reliable results. Furthermore, the periodicity of the linear moiré fringe requires linear-grating marks to be pre-aligned within the accuracy of a half period of the gratings. The geometric imaging alignment of the shape “+” as a coarse alignment mark is not reliable and may affect the final accuracy. Moreover, it is really inconvenient to check back and forth between two sets of marks in the
To address the issue above, this article proposes a modified moiré technique to fabricate a multi-level diffractive membrane using a novel design of alignment marks, which is a low-cost, reliable, simple, and convenient method. The alignment method and principle of the proposed moiré technique is described. Then, the fabrication process of a four-level membrane FZL with a 20 μm thickness and a 200 mm diameter is briefly introduced. Finally, the diffraction efficiency improvement using the modified alignment method is discussed. The investigation shows the potential of fabrication of large-aperture and high efficiency membrane optics with a relatively low cost.
Since the discovery of the moiré phenomenon by Raleigh in 1874[16], it gradually becomes an attractive method for optical alignment. The moiré fringe caused by the interference of light diffracted by the wafer and mask gratings can be seen directly through microscope, as shown in Fig.
Two concentric-circle gratings are depicted in Fig.
Similarly, the transmittance
The misalignment
When gratings
Moiré fringes show up when
Conventional marks are composed of concentric-circle gratings. Assuming that the misalignment between the marks on the wafer and the mask is along the
The moiré fringes generated by conventional concentric-circle marks are shown in Fig.
Fig. 3. Conventional moiré fringe generated by a computer ( , ) with an direction misalignment of (a) 0, (b) 0.25, (c) 0.5, and (d) 1 μm.
In order to solve the issue above, we propose a novel alignment mark comprising four parts; each part is a quarter of concentric circles with close period
Assuming that the misalignment between the marks on the wafer and mask is along
The proposed alignment mark doubles the magnification factor, so that a small misalignment between the mask and wafer will bring much more obvious changes in moiré fringes, as shown in Fig.
Fig. 5. The designed moiré fringe generated by a computer ( , ) with an direction misalignment of (a) 0, (b) 0.2, (c) 0.5, and (d) 1 μm.
When the gratings are misaligned by a 1/10 period of the grating in the
When the misalignment between the marks on the wafer and mask is along the
There are several advantages of the proposed four-quadrant circle alignment marks. First, high efficiency multi-level elements can be fabricated using conventional UV lithography, which significantly lowers equipment costs. Secondly, the modified marks can significantly enhance the alignment sensitivity. For alignment gratings of a 2 μm period, it is convenient to achieve the alignment accuracy of 0.2 μm. Furthermore, no complicated alignment equipment such as a laser interferometer or software calculation is needed. The moiré fringe can be directly seen through a microscope with broadband illumination when the gap between the wafer and mask changes from 0 to 20 μm. Finally, compared with linear-grating marks, only one set of marks is needed to identify the misalignment in both the
The proposed alignment method provides a low-cost, reliable, simple and convenient way for fabricating high efficiency multi-level structures, and the potential capability of the equipment is fully exploited.
In the following section, the fabrication process of four-level membrane optics is briefly introduced.
Considering the flexibility of thin membranes, multi-level surface features were initially made on a fused silica substrate. Then, the liquid polymer was cast onto the substrate and cured in place. Finally, a free-standing patterned membrane was obtained after separation from the substrate.
Figure
Reference [17] provides a theoretical description of a continuous phase profile’s discretization. For
After the second ion beam etching, the alignment error (AE) may cover a previously etched line, and result in spikes at the edge of the third level. These spikes can be removed using a diluted hydrofluoric acid (HF), as shown in Fig.
In order to test the effect of modified marks, we have done some experiments. Table
Table 1. Comparison of AE between 5 FZLs Fabricated on Fused Silica by Using Conventional Alignment Marks and Modified Alignment Marks, (p1=4.2 μm, p2=4 μm)
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According to the test results, the average AE of the FZLs made by conventional alignment marks is 0.64 μm. By using the modified alignment marks, the average AE is significantly reduced to 0.38 μm, as shown in Table
Furthermore, the diffraction efficiency into the
Table 2. Comparison of Diffraction Efficiency between 5 FZLs Fabricated on Fused Silica by Using Conventional Alignment Marks and Modified Alignment Marks, (p1=4.2 μm, p2=4 μm)
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Based on the proposed method, a four-level membrane FZL in 200 mm diameters was made. The full-aperture diffraction efficiency is 62.5%, and the root mean square (RMS) efficiency is 0.051, as shown in Fig.
The transmittance of the polyimide membrane is 85%, so the theoretical efficiency at the
We use the AFM to measure the profiles of the FZLs and analyze the data using the software “PC Grate”.
According to Eq. (
In this Letter, a modified alignment method based on an improved moiré technique is demonstrated to realize highly accurate and reliable alignment of multi-level FZLs on fused silica by using conventional UV lithography. Compared to conventional alignment marks, the AE is reduced and the diffraction efficiency is significantly improved by 13.52%. As an alternative of the laser overlay writing method, the modified alignment method through novel designed marks shows the potential to reduce the cost and achieve a high accuracy.
Replication of fused silica four-level patterns in 200 mm diameter and 20 μm thick membranes is demonstrated, with an over 62% diffraction efficiency into the
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Jian Zhang, Mengjuan Li, Ganghua Yin, Jianchao Jiao, Zhengkun Liu, Xiangdong Xu, Shaojun Fu. Low-cost method of fabricating large-aperture, high efficiency, Fresnel diffractive membrane optic using a modified moiré technique[J]. Chinese Optics Letters, 2016, 14(10): 100501.