[1] 杨力, 先进光学制造技术［M］. 北京: 科学出版社, 2001.

    YANG Li. Advanced optical manufacturing technology［M］. Beijing: Science Press, 2001.

[2] 马占龙, 等. 超光滑光学表面加工技术发展及应用［J］. 激光与光电子学进展, 2011, 48(8):71-77.

    MA Zhanlong, et al. Development and application of ultra-smooth optical surface polishing technology［J］. Laser & Optoelectronics Progress, 2011, 48(8):71-77.

[3] WOLFE C R, LAWSON J K. The measurement and analysis of wavefront structure from large aperture ICF optics ［J］. SPIE, 1997,2633:361-383.

[4] 沈正祥, 等.利用功率谱密度函数表征光学薄膜基底表面粗糙度［J］. 光学仪器, 2006, 28(4): 141-145.

    SHEN Zhengxiang, et al. Specifying surface roughness of optical film substrate suing the power spectral density［J］. Optical Instruments.2006, 28(4): 141-145.

[5] 刘耀红, 等.功率谱密度(PSD)在评价超精密光学表面中的应用研究［J］. 航空精密制造技术, 2006, 42(2): 001-003.

    LIU Yaohong, et al. Application of power spectral density to specify optical super-precision surface［J］. Aviation Precision Manufacturing Technology,2006, 42(2): 001-003.

[6] 陈伟.光学元件表面频谱分布影响因素的分析方法［J］. 应用光学, 2011,32(5): 967-970.

    CHEN Wei. Analysis of impact factors on frequency distribution of optic surface［J］. Journal of Applied Optics, 2011,32(5): 967-970.

[7] WILSON S R, REICHER D W, MCNEIL J R. Surface figuring using neutral ion beams［J］. SPIE,1989,966:74-81.

[8] 杨伟声.离子束辅助沉积(IAD)镀制抗电磁干扰与减反射复合薄膜［J］. 光学技术, 2014,40(1):75-78.

    YANG Weisheng. Coated technology on composite thin-film of anti-electromagnetic interference and anti-reflecting film by ion assisted deposition［J］. Optical Technique,2014,40(1):75-78.

[9] SHANBHAG P M, FEINBERG M R, SANDRI G, et al. Ion-beam machining of millimeter scale optics［J］. Applied Optics, 2000, 39(4): 599-611.

[10] 唐义,等.离子束辅助沉积二氧化铪薄膜紫外光学特性研究［J］. 光学技术, 2015,41(6):502-505.

    TANG Yi, et al. Research on the UV optical and surface property of HfO2 film by ion-assisted deposition［J］. Optical Technology, 2015,41(6):502-505.

[11] ALLEN L N. Progress in ion figuring large optics［J］.SPIE,1994, 2428:237-247.