中国激光, 2019, 46 (9): 0904006, 网络出版: 2019-09-10
基于透射式激光空气隙干涉的纳米分辨率精密位移测量 下载: 1058次
Precision Displacement Measurement with Nanometer Resolution Based on Transmissive Laser Air-Wedge Interference
引用该论文
王子轩, 冀聪, 王晶, 杨钢, 王肖隆, 林强. 基于透射式激光空气隙干涉的纳米分辨率精密位移测量[J]. 中国激光, 2019, 46(9): 0904006.
Wang Zixuan, Ji Cong, Wang Jing, Yang Gang, Wang Xiaolong, Lin Qiang. Precision Displacement Measurement with Nanometer Resolution Based on Transmissive Laser Air-Wedge Interference[J]. Chinese Journal of Lasers, 2019, 46(9): 0904006.
王子轩, 冀聪, 王晶, 杨钢, 王肖隆, 林强. 基于透射式激光空气隙干涉的纳米分辨率精密位移测量[J]. 中国激光, 2019, 46(9): 0904006. Wang Zixuan, Ji Cong, Wang Jing, Yang Gang, Wang Xiaolong, Lin Qiang. Precision Displacement Measurement with Nanometer Resolution Based on Transmissive Laser Air-Wedge Interference[J]. Chinese Journal of Lasers, 2019, 46(9): 0904006.