中国激光, 2019, 46 (9): 0904006, 网络出版: 2019-09-10 复制并引用该论文  本文已被引 5 次  被引通知

图 & 表

图 1. 透射式激光空气隙干涉型纳米位移测量装置原理图

Fig. 1. Schematic of micro-displacement measurement apparatus based on transmissive laser air-wedge interference

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图 2. 微位移测量仪器。(a)测量实验装置示意图;(b)干涉微位移测量仪器示意图;(c)光学干涉装置

Fig. 2. Micro-displacement measuring instrument. (a) Schematic of measurement and test apparatus; (b) schematic of interferometric micro-displacement measuring instrument; (c) optical interferometer structure

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图 3. 压电型纳米微动平台外加电压与相应位移的关系

Fig. 3. Displacement of the piezo-type nanometer translation stage as a function of applied voltage

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图 4. 实验图样和经图像处理图样。(a)实验原始图像;(b)经过强度相减处理、归一化后所得的强度差值图样

Fig. 4. Experimental image and image after image processing. (a) Raw measured image; (b) image obtained by intensity subtraction and normalization

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图 5. 微位移测量激光干涉光强分布和拟合结果

Fig. 5. Measured and fitted laser interference fringes in micro-displacement measurements

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图 6. 干涉条纹随压电陶瓷伸长量的变化情况

Fig. 6. Variation of interference fringes with the elongation of piezoelectric ceramics

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图 7. 压电陶瓷伸长量变化时的干涉条纹空间周期计算所得位移

Fig. 7. Displacement obtained by calculating the spatial period of interference fringes for scanned elongations of piezoelectric ceramics

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表 1微位移测量结果的不确定度

Table1. Uncertainty of micro-displacement measurement results

Uncertainty source Relative uncertainty /% Wedge length L about 5.0 Laser wavelength λ 0.1 Fitted fringe interval 0.3

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王子轩, 冀聪, 王晶, 杨钢, 王肖隆, 林强. 基于透射式激光空气隙干涉的纳米分辨率精密位移测量[J]. 中国激光, 2019, 46(9): 0904006. Wang Zixuan, Ji Cong, Wang Jing, Yang Gang, Wang Xiaolong, Lin Qiang. Precision Displacement Measurement with Nanometer Resolution Based on Transmissive Laser Air-Wedge Interference[J]. Chinese Journal of Lasers, 2019, 46(9): 0904006.