中国激光, 2019, 46 (9): 0904006, 网络出版: 2019-09-10   

基于透射式激光空气隙干涉的纳米分辨率精密位移测量 下载: 1058次

Precision Displacement Measurement with Nanometer Resolution Based on Transmissive Laser Air-Wedge Interference
作者单位
浙江工业大学理学院光学与光电子研究中心, 浙江 杭州 310023
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王子轩, 冀聪, 王晶, 杨钢, 王肖隆, 林强. 基于透射式激光空气隙干涉的纳米分辨率精密位移测量[J]. 中国激光, 2019, 46(9): 0904006.

Wang Zixuan, Ji Cong, Wang Jing, Yang Gang, Wang Xiaolong, Lin Qiang. Precision Displacement Measurement with Nanometer Resolution Based on Transmissive Laser Air-Wedge Interference[J]. Chinese Journal of Lasers, 2019, 46(9): 0904006.

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王子轩, 冀聪, 王晶, 杨钢, 王肖隆, 林强. 基于透射式激光空气隙干涉的纳米分辨率精密位移测量[J]. 中国激光, 2019, 46(9): 0904006. Wang Zixuan, Ji Cong, Wang Jing, Yang Gang, Wang Xiaolong, Lin Qiang. Precision Displacement Measurement with Nanometer Resolution Based on Transmissive Laser Air-Wedge Interference[J]. Chinese Journal of Lasers, 2019, 46(9): 0904006.

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