[1] LEACH R, CHETWYND D, BLUNT L, et al.. Recent advances in traceable nanoscale dimension and force metrology in the UK ［J］.Measurement Science and Technology, 2006,17(3):467-476.

[2] DAI G, WOLFF H, POHLENZ F, et al.. A metrological large range atomic force microscope with improved performance ［J］.Review of Scientific Instrument, 2009,80(4):043702.

[3] KRAMAR J A, DIXSON R, ORJI N G. Scanning probe microscope dimensional metrology at NIST ［J］.Measurement Science and Technology, 2011,22(2):024001.

[4] GONDA S, DOI T, KUROSAWA T, et al.. Real-time, interferometrically measuring atomic force microscope for direct calibration of standards ［J］.Review of Scientific Instrument, 1999,70(8):3362-3368.

[5] YIN B H, CHEN D X, LIN Y S, et al.. Design of AFM system with high speed and large scanning range ［J］.Opt. Precision Eng., 2011,19(11):2651-2656. (in Chinese)

[6] LU M, GAO S, JIN Q, et al.. An atomic force microscope head designed for nanometrology ［J］. Measurement Science and Technology, 2007,18(6):1735-1739.

[7] DAI G, POHLENZ F, DANZEBRINK H, et al.. Metrological large range scanning probe microscope ［J］. Review of Scientific Instrument, 2004,75(4):962-969.

[8] KEEM T, GONDA S, MISUMI I, et al.. Removing nonlinearity of a homodyne interferometer by adjusting the gains of its quadrature detector systems ［J］. Applied Optics, 2004,43(12):2443-2448.

[9] HEYDEMANN P. Determination and correction of quadrature fringe measurement errors in interferometers ［J］. Applied Optics, 1981,20(19):3382-3384.

[10] DAI G, POHLENZ F, DANZEBRINK H, et al.. Improving the performance of interferometers in metrological scanning probe microscopes ［J］.Measurement Science and Technology, 2004,15(2):444-450.

[11] LU M Z, GAO S T, SHI Y S, et al.. Research in the nonlinearity correction of the homodyne interferometer ［J］. Acta Metrologica Sinica, 2010,31(4):289-293. (in Chinese)