磁悬浮分子泵用Hartley涡流传感器
王坤, 张利胜, 陈少华, 韩邦成. 磁悬浮分子泵用Hartley涡流传感器[J]. 光学 精密工程, 2018, 26(2): 344.
WANG Kun, ZHANG Li-sheng, CHEN Shao-hua, HAN Bang-cheng. Hartley eddy current sensor used in maglev molecular pump[J]. Optics and Precision Engineering, 2018, 26(2): 344.
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王坤, 张利胜, 陈少华, 韩邦成. 磁悬浮分子泵用Hartley涡流传感器[J]. 光学 精密工程, 2018, 26(2): 344. WANG Kun, ZHANG Li-sheng, CHEN Shao-hua, HAN Bang-cheng. Hartley eddy current sensor used in maglev molecular pump[J]. Optics and Precision Engineering, 2018, 26(2): 344.