发光学报, 2016, 37 (4): 457, 网络出版: 2016-06-06   

退火温度对非晶铟钨氧薄膜晶体管特性的影响

Effect of Annealing Temperature on Performance of Amorphous InWO Thin Film Transistors
作者单位
上海交通大学 电子工程系, 上海 200240
引用该论文

许玲, 吴崎, 董承远. 退火温度对非晶铟钨氧薄膜晶体管特性的影响[J]. 发光学报, 2016, 37(4): 457.

XU Ling, WU Qi, DONG Cheng-yuan. Effect of Annealing Temperature on Performance of Amorphous InWO Thin Film Transistors[J]. Chinese Journal of Luminescence, 2016, 37(4): 457.

参考文献

[1] NOMURA K, OHTA H, TAKAGI A, et al.. Room-temperature fabrication of transparent flexible thin-film transistors using amorphous oxide semiconductors [J]. Nature, 2004, 432(7016):488-492.

[2] LEE G J, KIM J, KIM J H, et al.. High performance, transparent a-IGZO TFTs on a flexible thin glass substrate [J]. Semicond. Sci. Technol., 2014, 29(3):035003.

[3] HSU H H, CHANG C Y, CHENG C H. A flexible IGZO thin-film transistor with stacked TiO2-based dielectrics fabricated at room temperature [J]. IEEE Electron. Dev. Lett., 2013, 34(6):768-770.

[4] MNZENRIEDER N, ZYSSET C, PETTI L, et al.. Flexible double gate a-IGZO TFT fabricated on free standing polyimide foil [J]. Solid State Electron., 2013, 84:198-204.

[5] 苟昌华,武明珠,郭永林,等. 未退火InGaZnO作为缓冲层的InGaZnO薄膜晶体管性能研究 [J]. 液晶与显示, 2015, 30(4):602-607.

    GOU C H, WU M Z, GUO Y L, et al.. Effects of using InGaZnO without annealing as buffer layer on the performance of InGaZnO thin film transistors [J]. Chin. J. Liq. Cryt. Disp., 2015, 30(4):602-607. (in Chinese)

[6] LIU G X, LIU A, ZHU H H, et al.. Low-temperature, nontoxic water-induced metal-oxide thin films and their application in thin-film transistors [J]. Adv. Funct. Mater., 2015, 25(17):2564-2572.

[7] DOMINGUEZ M A, FLORES F, LUNA A, et al.. Impact of active layer thickness in thin-film transistors based on zinc oxide by ultrasonic spray pyrolysis [J]. Solid State Electron., 2015, 109:33-36.

[8] LI H U, JACKSON T N. Oxide semiconductor thin film transistors on thin solution-cast flexible substrates [J]. IEEE Electr. Device Lett., 2015, 36(1):35-37.

[9] LAN L F, XIONG N N, XIAO P, et al.. Enhancement of bias and illumination stability in thin-film transistors by doping InZnO with wide-band-gap Ta2O5 [J]. Appl. Phys. Lett., 2013, 102(24):242102.

[10] AIKAWA S, DARMAWAN P, YANAGISAWA K, et al.. Thin-film transistors fabricated by low-temperature process based on Ga- and Zn-free amorphous oxide semiconductor [J]. Appl. Phys. Lett., 2013, 102(10):102101.

[11] KIZU T, AIKAWA S, MITOMA N, et al.. Low-temperature processable amorphous In-W-O thin-film transistors with high mobility and stability [J]. Appl. Phys. Lett., 2014, 104(15):152103.

[12] SHI J F, DONG C Y, DAI W J, et al.. The influence of RF power on the electrical properties of sputtered amorphous In-Ga-Zn-O thin films and devices [J]. J. Semicond., 2013, 34(8):084003.

[13] ABE Y, ISHIYAMA N, KUNO H, et al.. Amorphous indium tungsten oxide films prepared by DC magnetron sputtering [J]. J. Mater. Sci., 2005, 40(7):1611-1614.

[14] FUH C S, SZE S M, LIU P T, et al.. Role of environmental and annealing conditions on the passivation-free in-Ga-Zn-O TFT [J]. Thin Solid Films, 2011, 520(5):1489-1494.

[15] RAJA J, JANG K, NGUYEN H H, et al.. Enhancement of electrical stability of a-IGZO TFTs by improving the surface morphology and packing density of active channel [J]. Curr. Appl. Phys., 2013, 13(1):246-251.

许玲, 吴崎, 董承远. 退火温度对非晶铟钨氧薄膜晶体管特性的影响[J]. 发光学报, 2016, 37(4): 457. XU Ling, WU Qi, DONG Cheng-yuan. Effect of Annealing Temperature on Performance of Amorphous InWO Thin Film Transistors[J]. Chinese Journal of Luminescence, 2016, 37(4): 457.

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