光子学报, 2017, 46 (10): 1014004, 网络出版: 2017-11-24  

飞秒激光打孔硅的孔洞形貌研究

Hole Morphology in Femtosecond Laser Drilling of Silicon
作者单位
电子工程学院 脉冲功率激光技术国家重点实验室, 合肥 230037
引用该论文

李志明, 王玺, 聂劲松. 飞秒激光打孔硅的孔洞形貌研究[J]. 光子学报, 2017, 46(10): 1014004.

LI Zhi-ming, WANG Xi, NIE Jin-song. Hole Morphology in Femtosecond Laser Drilling of Silicon[J]. ACTA PHOTONICA SINICA, 2017, 46(10): 1014004.

参考文献

[1] JIANG Lan. Repeatable nanostructures in dielectrics by femtosecond laser pulse trains[J]. Applied Physics Letters, 2005, 87(87): 151104.

[2] 张彦斐, 王雷雷, 宫金良. 飞秒激光多脉冲烧蚀镍钛合金的数值模拟[J]. 光子学报, 2016, 45(5): 0514002.

    ZHANG Yan-fei, WANG Lei-lei, GONG Jin-liang. Numerical simulation of femtosecond laser multi-pulse ablation of Ni-Ti alloy[J]. Acta Photonica Sinica, 2016, 45(5): 0514002.

[3] RETHFELD B, KAISER A, VICANEK M, et al. Ultrafast dynamics of nonequilibrium electrons in metals under femtosecond laser irradiation[J]. Physical Review B, 2002, 65(21): 392-397.

[4] LENZNER M, KRGER J, SARTANIA S, et al. Femtosecond optical break down in dielectrics[J]. Physical Review Letters, 1998, 80(18): 4076-4079.

[5] BONSE J, ROSENFELD A, KRGER J. On the role of surface plasmon polaritons in the formation of laser-induced periodic surface structures upon irradiation of silicon by femtosecond-laser pulses[J]. Journal of Applied Physics, 2009, 106(10): 104910.

[6] LI Xing-wen, WEI Wen-fu, WU Jian, et al. The Influence of spot size on the expansion dynamics of nanosecond-laser-produced copper plasmas in atmosphere[J]. Journal of Applied Physics, 2013, 113(24): 6886.

[7] JIAO Li-shi, NQ E Y, ZHENG Hong-yu, et al. Theoretical study of pre-formed hole geometries on femtosecond pulse energy distribution in laser drilling.[J]. Optics Express, 2015, 23(4): 4927-4934.

[8] JIANG Lan, TSAI H. A plasma model combined with an improved two-temperature equation for ultrafast laser ablation of dielectrics[J]. Journal of Applied Physics, 2008, 104(9): 093101.

[9] STOIAN R, ASHKENASI D, ROSENFELD A, et al. Coulomb explosion in ultrashort pulsed laser ablation of Al2O3[J]. Physical Review B, 2000, 62(19): 13167-13173.

[10] BULGAKOVA N M, STOIAN R, ROSENFELD A, et al. A general continuum approach to describe fast electronic transport in pulsed laser irradiated materials: The problem of Coulomb explosion[C]. High-Power Laser Ablation. International Society for Optics and Photonics, 2005: 345-356.

[11] KORFIATIS D P, THOMA K A, VARDAXOGLOU J C. Conditions for femtosecond laser melting of silicon [J]. Applied Physics, 2007, 40, 6803-6808.

[12] LADIEU F, MARTIN P, GUIZARD S. Measuring thermal effects in femtosecond laser-induced breakdown of dielectrics[J]. Applied Physics Letters, 2002, 81(6): 957-959.

[13] PERRY M D, STUART B C, BANKS P S, et al. Ultrashort-pulse laser machining of dielectric materials[J]. Journal of Applied Physics, 1999, 85(9): 6803-6810.

[14] CHOI T Y, GRIGOROPOULOS C P. Plasma and ablation dynamics in ultrafast laser processing of crystalline silicon[J]. Journal of Applied Physics, 2002, 92(9): 4918-4925.

[15] HARB M, ERNSTORFER R, DARTIGALONGUE T, et al. Carrier relaxation and lattice heating dynamics in silicon revealed by femtosecond electron diffraction.[J]. Journal of Physical Chemistry B, 2007, 110(50): 25308-25313.

[16] DERRIEN T J, KRGER J, ITINA T E, et al. Rippled area formed by surface plasmon polaritons upon femtosecond laser double-pulse irradiation of silicon.[J]. Applied Physics A, 2014, 117(1): 77-81.

[17] ZHANG Hao, WOLBERS S A, KROL D M, et al. Modeling and experiments of self-reflectivity under femtosecond ablation conditions[J]. Journal of the Optical Society of America B, 2015, 32(4): 606-616.

[18] GAN Yong, CHEN J K. Combinedcontinuum-atomistic modeling of ultrashort-pulsed laser irradiation of silicon[J]. Applied Physics A, 2011, 105(2): 427-437.

[19] ZENG Xian-zhong, SAMUEL S M, LIU Chun-yi, et al. Plasma diagnostics during laser ablation in a cavity[J]. Spectrochimica Acta Part B, 2003, 58(5): 867-877.

[20] HWANG D J, GRIGOROPOULOS C P, CHOI T Y. Efficiency of silicon micromachining by femtosecond laser pulses in ambient air[J]. Journal of Applied Physics, 2006, 99(8): 1706.

[21] WANG Tie-jun, JU Jing-jing, WEI Ying-xia, et al. Longitudinally resolved measurement of plasma density along femtosecond laser filament via terahertz spectroscopy[J]. Applied Physics Letters, 2014, 105(5): 863.

李志明, 王玺, 聂劲松. 飞秒激光打孔硅的孔洞形貌研究[J]. 光子学报, 2017, 46(10): 1014004. LI Zhi-ming, WANG Xi, NIE Jin-song. Hole Morphology in Femtosecond Laser Drilling of Silicon[J]. ACTA PHOTONICA SINICA, 2017, 46(10): 1014004.

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