三坐标轮廓测量仪测量离轴非球面的数据处理

王建明; 郭培基; 仇谷烽

光学技术, 2013, 39 (4): 291, 网络出版: 2013-09-04

三坐标轮廓测量仪测量离轴非球面的数据处理

Data processing of off-axis aspheric surface measurement by coordinate contour measuring machine

论文大纲

王建明 ^*郭培基仇谷烽

作者单位

苏州大学现代光学技术研究所, 江苏苏州 215000

光学测量离轴非球面三坐标测量仪测量精度 optical measurement off-axis aspheric surface CMM measurement precision

摘要

为了研究三坐标轮廓测量仪测量离轴非球面的数据处理,介绍了三坐标轮廓测量仪测量离轴非球面的原理, 对除三坐标测量仪自身误差之外的误差进行了详细的分析, 在此基础上建立了校正这些误差的离轴非球面数据处理模型。使用Matlab与C语言混合编程, 并进行了数据模拟, 对实际离轴非球面进行了测量。在对离轴非球面数据进行模拟时, 面形误差PV值小于0.001μm；实际应用时, 面形误差PV值约为0.245μm, 利用数据处理模型得到的面形误差PV值为1.2μm, 达到了三坐标轮廓测量仪本身的测量精度。结果表明, 所建立的数据处理模型和处理软件是正确的。

Abstract

In order to research the data processing of the off-axis aspheric surface measurement by coordinate contour measuring machine(CMM), the principle of the off-axis aspheric surface measurement by the CMM is introduced, the detailed analysis of the errors except the instrument itself errors is given, the off-axis aspheric surface data processing model for these error corrections is built on this basis. Matlab and C language are mixed programming in the model. After data simulation the actual off-axis aspheric surfaces are measured. In the data simulation, the surface error PV value is less than 0.001μm. For a practical application, the surface error PV value of an actual off-axis aspheric surface is about 0.245μm, and using the data processing model it can reach 1.2μm,close to the instrument itself measurement precision. The result indicates that the established model and the data processing software are correct.

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王建明, 郭培基, 仇谷烽. 三坐标轮廓测量仪测量离轴非球面的数据处理[J]. 光学技术, 2013, 39(4): 291. WANG Jianming, GUO Peiji, QIU Gufeng. Data processing of off-axis aspheric surface measurement by coordinate contour measuring machine[J]. Optical Technique, 2013, 39(4): 291.

三坐标轮廓测量仪测量离轴非球面的数据处理

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