光学学报, 2011, 31 (4): 0412003, 网络出版: 2011-03-30   

基于数字全息显微成像的微光学元件三维面形检测

3D Profile Measurement for Micro-Optical Component by Using Digital Holographic Microscopy
王云新 1,2,*王大勇 1,2赵洁 1,2李艳 1,2万玉红 1,2
作者单位
1 北京工业大学应用数理学院, 北京 100124
2 北京工业大学微纳信息光子技术研究所, 北京 100124
引用该论文

王云新, 王大勇, 赵洁, 李艳, 万玉红. 基于数字全息显微成像的微光学元件三维面形检测[J]. 光学学报, 2011, 31(4): 0412003.

Wang Yunxin, Wang Dayong, Zhao Jie, Li Yan, Wan Yuhong. 3D Profile Measurement for Micro-Optical Component by Using Digital Holographic Microscopy[J]. Acta Optica Sinica, 2011, 31(4): 0412003.

参考文献

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王云新, 王大勇, 赵洁, 李艳, 万玉红. 基于数字全息显微成像的微光学元件三维面形检测[J]. 光学学报, 2011, 31(4): 0412003. Wang Yunxin, Wang Dayong, Zhao Jie, Li Yan, Wan Yuhong. 3D Profile Measurement for Micro-Optical Component by Using Digital Holographic Microscopy[J]. Acta Optica Sinica, 2011, 31(4): 0412003.

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