基于数字全息显微成像的微光学元件三维面形检测
[1] . Xu, X. Peng, A. Asundi et al.. Hybrid holographic microscope for interferometric measurement of microstructures[J]. Opt. Engng., 2001, 40(11): 2533-2539.
[2] . Miccio, A. Finizio, S. Grilli et al.. Tunable liquid microlens arrays in electrode-less configuration and their accurate characterization by interference microscopy[J]. Opt. Express, 2009, 17(4): 2487-2499.
[3] . J. Stout, L. Blunt. Nanometres to micrometres: three-dimensional surface measurement in bio-engineering[J]. Surface and Coatings Technology, 1995, 71(2): 69-81.
[4] C. Aktouf, B. Pannetier, P. Lemaitre-Auger et al.. On-line testing of embedded systems using optical probes: system modeling and probing technology［C］. Proceeding of the Eighth IEEE International On-Line Testing Workshop, 2002: 191
[5] . Yoshida, S. Tanaka, M. Hirata et al.. Optical biopsy of GI lesions by reflectance-type laser-scanning confocal microscopy[J]. Gastrointestinal Endoscopy, 2007, 66(1): 144-149.
[6] . Jason, A. Robert. Detailed studies of molecular conductance using atomic resolution scanning tunneling microscopy[J]. Nano Lett., 2006, 6(3): 390-397.
[7] . Niimi, T. Matsui, H. Kambara et al.. Scanning tunneling microscopy and spectroscopy of the electronic local density of states of graphite surfaces near monoatomic step edges[J]. Phys. Rev., 2006, 73(8): 085421-1.
[8] 桂敏, 匡登峰, 方志良. 基于相位测量法测量透射式相位光栅的表面形貌［J］. 光电子·激光, 2009, 20(10): 1337～1341
Gui Min, Kuang Dengfeng, Fang Zhiliang. Measurement of surface topography of transmission phase grating based on phase measure method［J］. J. Optoelectronics·Laser, 2009, 20(10): 1337～1341
[9] 焦国华, 李育林, 胡宝文. Mirau相移干涉法测量微透镜阵列面形［J］. 光子学报, 2007, 36(10): 1924～1927
[10] 刘贱平, 梁丽萍, 金世龙 等. 大曲率光学零件面形的空间载频外差干涉术检测［J］. 红外与激光工程, 2009, 38(1): 110～113
Liu Jianping, Liang Liping, Jin Shilong et al.. Testing large curvature surface of optical element with spatial carrier heterodyne interferometry［J］. Infrared and Laser Engineering, 2009, 38(1): 110～113
[11] . Colomb, E. Cuche, F. Charrière et al.. Automatic procedure for aberration compensation in digital holographic microscopy and applications to specimen shape compensation[J]. Appl. Opt., 2006, 45(5): 851-863.
[12] 姜宏振, 赵建林, 邸江磊 等. 数字无透镜傅里叶变换全息术中非傍轴及离焦像差的校正［J］. 光学学报, 2008, 28(8): 1457～1462
[13] J. Khn, T. Colomb, F. Montfort et al.. Real-time dual-wavelength digital holographic microscopy for MEMS characterization [C]. SPIE, 2007, 6716: 671608-1～10
[14] Y. Hao, A. Asundi. Comparison of digital holographic microscope and confocal microscope methods for characterization of micro-optical diffractive components［C］. SPIE, 2008, 7155: 71550B-1～10
[15] . Kemper, S. Sturwald, C. Remmersmanna et al.. Characterisation of light emitting diodes (LEDs) for application in digital holographic microscopy for inspection of micro and nanostructured surfaces[J]. Opt. & Lasers in Enging., 2008, 46(7): 499-507.
[16] . . Lensless digital holography with short-coherence light source for three-dimensional surface contouring of reflecting micro-object[J]. Opt. Commun., 2007, 270(2): 176-179.
[17] . M. Hossain, C. Shakher. Temperature measurement in laminar free convective flow using digital olography[J]. Appl. Opt., 2009, 48(10): 1869-1877.
[18] . Ferraro, S. D. Nicola, A. Finizio et al.. Compensation of the inherent wave front curvature in digital holographic coherent microscopy for quantitative phase-contrast imaging[J]. Appl. Opt., 2003, 42(11): 1938-1946.
[19] 张亦卓, 王大勇, 赵洁 等. 数字全息中实用相位解包裹算法研究［J］. 光学学报, 2009, 29(12): 3323～3327
[20] 范琦, 赵建林, 向强 等. 改善数字全息显微术分辨率的几种方法 ［J］. 光电子·激光, 2005, 16(2): 226～230
Fan Qi, Zhano Jianlin, Xiang Qiang et al.. Methods of improving resolution of digital holographic microscopy［J］. J. Optoelectronics·Laser, 2005, 16(2): 226～230
王云新, 王大勇, 赵洁, 李艳, 万玉红. 基于数字全息显微成像的微光学元件三维面形检测[J]. 光学学报, 2011, 31(4): 0412003. Wang Yunxin, Wang Dayong, Zhao Jie, Li Yan, Wan Yuhong. 3D Profile Measurement for Micro-Optical Component by Using Digital Holographic Microscopy[J]. Acta Optica Sinica, 2011, 31(4): 0412003.
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