强激光与粒子束, 2013, 25 (6): 1479, 网络出版: 2013-04-23  

基于金属孔阵列的聚酰亚胺薄膜太赫兹探测

Terahertz detection of polyimide films based on metal hole arrays
作者单位
电子科技大学 电子薄膜与集成器件国家重点实验室, 成都 610054
摘要
优化设计了多种不同孔径和形状的太赫兹波段的亚波长金属孔阵列结构,结合超薄低折射率的聚酰亚胺(PI)薄膜,探索了太赫兹时域光谱技术对超薄低折射率的探测灵敏性。利用飞秒微加工技术制备了一系列亚波长金属孔阵列结构,利用太赫兹时域光谱技术测试了阵列结构的反射波谱,获得了强烈的反射共振现象。然后在亚波长金属孔阵列结构背面叠加PI薄膜,结果表明太赫兹反射峰出现了显著低频移动现象。利用这一现象,实现了低至10 μm的PI薄膜的有效探测,说明亚波长金属孔阵列结构在太赫兹传感领域对检测超薄低折射率薄膜材料有极强敏感性。
Abstract
Several metal hole array(MHA) structures of different sizes and shapes in THz were designed. The detection sensitivity of the structures with ultra-thin and low refractive index polyimide films, was explored on a THz time-domain system. MHAs with different structures were fabricated with femtosecond micromachining technology, and the THz reflection spectra were measured by the THz time-domain system. By attaching an ultra-thin polyimide (10 μm) film to the MHA, an obvious blue-shift of reflective resonance peak was observed, which indicated a high sensitivity of MHA to low refractive index materials. This characteristic allows us to achieve MHA-based high-sensitive sensor at THz band.
参考文献

[1] 刘盛刚, 姚建铨, 张杰, 等. 太赫兹科学技术的新发展[J]. 中国基础科学, 2006, 8(1):7-12.(Liu Shenggang, Yao Jianquan, Zhang Jie, et al. The new development of terahertz science and technology. China Basic Science, 2006, 8(1):7-12)

[2] 牧凯军, 张振伟, 张存林, 等. 太赫兹科学与技术[J]. 中国电子科学研究院学报, 2009, 4(3):221-230.(Mu Kaijun, Zhang Zhenwei, Zhang Cunlin, et al. Terahertz science and technology. Journal of China Academy of Electronics and Information Technology, 2009, 4(3):221-230)

[3] Fumiaki M, Mitsuo W T. Coupling between localized resonance and excitation of surface waves in metal hole arrays[J]. Phys Rev B, 2009, 79:153405.

[4] Okada T, Tsuji S, Tanaka K, et al. Transmission properties of surface plasmon polaritons and localized resonance in semiconductor hole arrays[J]. Appl Phys Lett, 2010, 97:261111.

[5] Fumiaki M. Effect of dielectric thin films on reflection properties of metal hole arrays[J]. Appl Phys Lett ,2010, 96:021106.

[6] Han Jiaguang, Zhen Tian, Lu Xinchao, et al. Magnetic and magnetothermal tunabilities of subwavelength-hole arrays in a semiconductor sheet[J]. Opt Lett, 2009, 34(9):1465-1467

[7] Han N R, Chen Z C, Lim C S, et al. Broadband multi-layer terahertz metamaterials fabrication and characterization on flexible substrates[J]. Opt Express, 2011, 19(8):6992-6997.

[8] Hu Tao, Strikwerda A C, Fan K, et al. Terahertz metamaterials on free-standing highly-flexible polyimide substrates[J]. J Phys D:Appl Phys, 2008, 41:232004.

[9] Gupta S. Infrared filters using metallic photonic band gap structures on flexible substrates[J]. Appl Phys Lett, 1997, 71(17):2412-2414.

[10] Krzyszt I, Andrew C S, Kebin F, et al. Flexible metamaterial absorbers for stealth applications at terahertz frequencies[J]. Opt Express, 2012, 20(1):635-642.

[11] 张兴宁, 陈稷, 周泽魁. 太赫兹时域光谱技术[J]. 激光与光电子学进展,2005, 42(7):11-17.(Zhang Xingning, Chen Ji, Zhou Zekui. THz time-domain spectroscopy technology. Laser and Optoelectronics Progress, 2005, 42(7):11-17)

董凯, 赖伟恩, 孙丹丹, 文岐业, 张怀武. 基于金属孔阵列的聚酰亚胺薄膜太赫兹探测[J]. 强激光与粒子束, 2013, 25(6): 1479. Dong Kai, Lai Weien, Sun Dandan, Wen Qiye, Zhang Huaiwu. Terahertz detection of polyimide films based on metal hole arrays[J]. High Power Laser and Particle Beams, 2013, 25(6): 1479.

关于本站 Cookie 的使用提示

中国光学期刊网使用基于 cookie 的技术来更好地为您提供各项服务,点击此处了解我们的隐私策略。 如您需继续使用本网站,请您授权我们使用本地 cookie 来保存部分信息。
全站搜索
您最值得信赖的光电行业旗舰网络服务平台!