光谱学与光谱分析, 2018, 38 (4): 1007, 网络出版: 2018-06-12
射频容性耦合等离子体放电特性的光谱诊断
Spectroscopic Diagnostics on Discharge Characteristics of RF Capacitive Coupled Plasma
补充材料
刘冲, 何湘, 张亚春, 陈建平, 陈玉东, 曾小军, 陈秉岩, 朱卫华. 射频容性耦合等离子体放电特性的光谱诊断[J]. 光谱学与光谱分析, 2018, 38(4): 1007. LIU Chong, HE Xiang, ZHANG Ya-chun, CHEN Jian-ping, CHEN Yu-dong, ZENG Xiao-jun, CHEN Bing-yan, ZHU Wei-hua. Spectroscopic Diagnostics on Discharge Characteristics of RF Capacitive Coupled Plasma[J]. Spectroscopy and Spectral Analysis, 2018, 38(4): 1007.