光学 精密工程, 2017, 25 (1): 93, 网络出版: 2017-03-10   

ALON高陡度薄壁保形非球面的超精密磨削工艺

Ultra-precision grinding process of high-gradient thin conformal aspheric on ALON ceramic
作者单位
1 哈尔滨工业大学 机电工程学院 精密工程研究所, 黑龙江 哈尔滨 150001
2 中国空空导弹研究院, 河南 洛阳 471009
3 哈尔滨工业大学 航天学院 光电子技术研究所, 哈尔滨 黑龙江 150080
摘要
为了实现新型红外陶瓷ALON高陡度薄壁保形非球面的超精密磨削加工, 首先根据ALON的材料属性和高陡度薄壁保形非球面的结构特性, 进行了其超精密磨削加工工艺性分析, 并基于有限元计算方法, 完成了面向ALON高陡度薄壁保形非球面的精密夹具的设计以及关键参数的优化。然后完成了ALON的超精密磨削工艺实验, 工艺实验结果表明减小工件转速和砂轮粒度都会降低ALON的平均表面粗糙度Ra值, 但砂轮粒度对磨削后ALON的表面粗糙度影响更显著。最后实现了ALON高陡度薄壁保形非球面的超精密磨削加工, 磨削后的ALON高陡度薄壁保形非球面的面形精度PV值为2 μm, 表面粗糙度Ra值可达8.6 nm。
Abstract
In order to realize the ultra-precision grinding of high-gradient thin conformal aspheric on ALON infrared ceramic, the material property of ALON and the structured feature of high-gradient thin conformal aspheric was analyzed firstly. The precision jig was design and the main dimensions were optimized by finite element method. Secondly, the ALON grinding experiments were implemented. The results indicated that although the roughness would reduce with the decrease of workpiece spindle speed and wheel abrasive size, the effect of abrasive size on roughness was more significant. Finally, the ultra-precision grinding procedures were established for ALON high-gradient thin conformal aspheric. The form accuracy PV value of ground ALON workpiece was 2 μm, while the surface roughness was 8.6 nm.
参考文献

[1] SHANNON R R, MILS J P, POLICOVE H M. Conformal optics technology enables window shapes that conform to an application, not to conventional optical limitations [J]. Photonics Spectra, 2001, 35(4): 26-34.

[2] 李圣怡. 保形红外光学元件制造技术[J]. 航空精密制造技术, 2008(24): 55-57.

    LI SH Y.Manufacturing technology of conformal infrared optical component [J]. Aeronautical Manufacturing Technology, 2008(24): 55-57.(in Chinese)

[3] 樊会涛, 崔颢, 天光. 空空导弹70年发展综述[J]. 航空兵器, 2016, 2(1): 3-12.

    FAN H T, CUI H, TIAN G. A review on the 70-year development of air-to-air missiles [J]. Aero Weaponry, 2016, 2(1): 3-12.(in Chinese)

[4] DEFISHER S, FESS E, WOLFS F. Freeform and conformal optical manufacturing [J]. SPIE, 2013, 8308.

[5] NELSON J D, GOULD A, SMITH N. Advances in freeform optics fabrication for conformal window and dome applications [J]. SPIE, 2013, 8708.

[6] SCHOEN J. Conformal ogive ALON dome fabrication[R]. COM, 2004, 9, 16.

[7] GOELA J S, ASKINAZI J, ROBINSON B. Replication of conformal surfaces by chemical vapor deposition [C]. Proc. of the 8th Electromagnetic Window Symposium, Portland, 2004, 4: 313-326.

[8] 张发. 热压多晶氟化镁保形头罩加工工艺研究[D]. 长沙: 国防科技大学硕士论文, 2009.

    ZHANG F. Research on Processing Technics of Hot-Pressed Poly-Crystal Magnesium Fluoride Conformal Dome [D]. Changsha: Graduate School of National University of Defense Technology, 2009.(in Chinese)

[9] SCHAEFER P, EICHHOHZ A R, SULZBACH C F. Fabrication challenges associated with conformal optics [J]. SPIE, 2001, 4375.

[10] RUCKMAN L J, FESS M E, POLICOVE H M. Deterministic processes for manufacturing conformal(freeform) optical surfaces [J]. SPIE, 2001, 4375: 108-113.

[11] 武琪, 王思青, 张长瑞, 等. 耐高温透明AlON陶瓷的研究进展与展望[J]. 硅酸盐通报, 2013, 4(32): 657-662.

    WU Q, WANG S Q, ZHANG CH R, et al.. Progress and prospect of high temperature transparent AlON ceramics [J]. Bulletin of the Chinese Ceramic Society, 2013, 4(32): 657-662.(in Chinese)

[12] CHEN B, GUO B, ZHAO Q L. On-machine precision form truing of arc-shaped diamond wheels [J]. Journal of Materials Processing Technology, 2015, 223: 65-74.

[13] GUO B, ZHAO Q L. Wheel normal grinding of hard and brittle materials [J]. The International Journal of Advanced Manufacturing Technology, 2015, 79(5-8): 873-880.

郭兵, 张春雨, 王金虎, 赵清亮, 陈洪许, 孙金霞, 于欣. ALON高陡度薄壁保形非球面的超精密磨削工艺[J]. 光学 精密工程, 2017, 25(1): 93. GUO Bing, ZHANG Chun-yu, WANG Jin-hu, ZHAO Qing-liang, CHEN Hong-xu, SUN Jin-xia, YU Xin. Ultra-precision grinding process of high-gradient thin conformal aspheric on ALON ceramic[J]. Optics and Precision Engineering, 2017, 25(1): 93.

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