[1] 叶友达. 高超声速空气动力学研究进展与趋势［J］. 科学通报, 2015, 60(12): 1095-1103. (Ye Youda. Advances and prospects in hypersonic aerodynamics. Chin Sci Bull, 2015, 60(12): 1095-1103)

[2] Silvester T B, Morgan R G. Skin-friction measurements and flow establishment within a long duct at superorbital speeds［J］. AIAA Journal, 2015 , 46(2) : 527-536.

[3] 雷强, 高杨, 王雄. MEMS壁面剪切应力传感器研究进展［J］. 中国测试, 2016, 42(7): 1-8. (Lei Qiang, Gao Yang, Wang Xiong. The development progress of MEMS wall shear stress sensors. China Measurement & Test, 2016, 42(7): 1-8)

[4] Smith T B, Schetz J A, Bui T.Development and ground testing of direct measuring skin friction gages for high enthalpy supersonic flight tests［R］. AIAA-2002-3134.

[5] 李鹏. 全局表面摩擦应力直接测量技术研究［D］. 南京: 南京航空航天大学, 2012. (Li Peng. Studies of direct measurement techniques about global skin friction. Nanjing: Nanjing University of Aeronautics and Astronautics, 2012)

[6] 吕治国, 李国君, 赵荣娟, 等. 激波风洞高超声速摩阻直接测量技术研究［J］. 实验流体力学, 2013, 27(12): 81-85. (Lu Zhiguo, Li Guojun, Zhao Rongjuan, et al. Direct measurement of skin friction at hypersonic shock tunnel. Journal of Experiments in Fluid Mechanics, 2013, 27(12): 81-85)

[7] 马洪强, 高贺, 毕志献. 高超声速飞行器相关的摩擦阻力直接测量技术［J］. 实验流体力学, 2011, 25(8): 83-88. (Ma Hongqiang, Gao He, Bi Zhixian. Direct measurement of skin friction for hypersonic flight vehicle. Journal of Experiments in Fluid Mechanics, 2011, 25(8): 83-88)

[8] 梁锦敏, 李建强, 蒋卫民, 等. MEMS传感器测量平板表面摩擦应力高速风洞试验［J］. 实验流体力学, 2013, 27(2): 1-14. (Liang Jinmin, Li Jianqiang, Jiang Weimin, et al. Skin friction measurement of a flat plate in high speed wind tunnel using MEMS sensors. Journal of Experiments in Fluid Mechanics, 2013, 27(2): 1-14)

[9] Ng K, Shajii J, Schmidt M A. A liquid shear-stress sensor using wafer-bonding technology［J］. J MEMS, 1992, 1: 89-94.

[10] Chandrasekharan V, Sells J, Arnold D P, et al. Characterization of a MEMS based floating element shear stress sensor［R］. AIAA-2009-316.

[11] Meloy J, Griffin J, Sells J et al. Experimental verification of a MEMS based skin friction sensor for quantitative wall shear stress measurement［R］. AIAA-2011-3995.

[12] Jiang Z, Farmer K R, Modi V. A MEMS device for measurement of skin friction with capacitive sensing［C］//Microelectromechanical Systems Conference 2001.

[13] McCarthy M, Frechette L G, Modi V, et al. Initial development of a MEMS wall shear stress sensor for propulsion applications［J］. Pure & Applied Chemistry, 2011, 76(4): 723-752.

[14] Tiliakos N, Papadopoulos G, Grady A O, et al. Preliminary testing of a MEMS based shear stress sensor for high speed flow application［R］. AIAA-2008-3948.

[15] 杜林, 蒲石, 史永贵, 等. 深刻蚀方法对硅基SIWF通孔显微结构的影响［J］. 西安电子科技大学学报, 2015(4): 307-312. (Du Lin, Pu Shi, Shi Yonggui, et al. Effects of deep etching methods on the microstructure of the etched vias of the silicon-based SIWF. Journal of Xidian University, 2015(4): 307-312)

[16] 蔡长龙, 马睿, 刘卫国, 等. 硅深刻蚀中掩蔽层材料刻蚀选择比的研究［J］. 半导体光电, 2009(2): 307-312. (Cai Changlong, Ma Rui, Liu Weiguo, et al. Study on etch selectivity ratio of masking materials in silicon deep etching. Semiconductor Optoelectronics, 2009(2): 307-312)