强激光与粒子束, 2017, 29 (10): 104103, 网络出版: 2017-10-30
微剪切应力传感器的加工工艺
Fabrication process of micro shear stress sensors
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袁明权, 雷强, 王雄. 微剪切应力传感器的加工工艺[J]. 强激光与粒子束, 2017, 29(10): 104103. Yuan Mingquan, Lei Qiang, Wang Xiong. Fabrication process of micro shear stress sensors[J]. High Power Laser and Particle Beams, 2017, 29(10): 104103.
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