长脉宽脉冲激光硅片弯曲成形试验
[1] 刘韧,季忠,张鹏,等.板料激光成形及其研究进展[J].锻压装备与制造技术,2004,3:17-21.LIU R,JI ZH,ZHANG P,et al..Sheet laser forming & research progress[J].Metal forming Equipment & Tech-nology,2004,3:17-21.(in Chinese)
[2] 陈敦军,向毅斌,吴诗淳,等.钛合金板料激光曲线弯曲及热辐射对其组织性能的影响[J].金属学报,2001,37(6):43-46.CHEN D J,XIANG Y B,WU SH CH,et al..Curved laser bending of titanium alloy sheets and effects of heat radia-tion on its microstructure and property[J].Acta Metallurgica Sinica,2001,37 (6):43-46.(in Chinese)
[3] 崔建丰,赵晶,樊仲维,等.厚硅片的高速激光切片研究[J].光学精密工程,2006,14(5):829-834.CUI J F,ZHAO J,FAN ZH W,et al..Study on LD-pumped Nd:YAG laser cutter for silicon wafer[J].Opt.Precision Eng.,2006,14(5):829-834.(in Chinese)
[4] FRUHAUF J,GARTNER E,JANSCH E,et al..Silicon as a plastic material[J].Micromesh Microeng,1999,9:305-312.
[5] LOSCHNER U,EXNER H,GARTNER,et al..Laser bending of silicon[J].SPIE,2003,4977:86-93.
[6] GARTNER E,FRUHAUF J,LOSCHNER U,et al..Laser bending of etched silicon microstructure[J].Micro sys tem Technologies,2001,7:23-26.
[7] EXNER H,LOSCHNER U.Contactless laser bending of silicon microstructures[J].SPIE,2003,5116:383-392.
[8] ZHANG R X,XU X F.Microscale bending of brittle materials using pulsed and CW lasers[J].SPIE,2002,4637:291-296.
[9] ZHANG R X,XU X F.High precision micro scale bending by pulsed and CW lasers[J].Transactions of the ASME,2003,125(8):512-518.
[10] . Finite element analysis of pulsed laser bending:the effect of melting and solidification[J]. Journal of Applied Mechanics, 2004, 71(5): 321-326.
[11] ZHANG R X,XU X F.Laser bending for high-precision curvature adjustment of micro cantilevers[J].AppliedPhysics Letters,2005,86(021114):1-3.
[12] MICHAEL P,JORG K,HENDRIK W,et al..Processing of silicon by Nd:YAG-lasers with harmonics generation[J].SPIE,2002,4637:496-504.
[13] 陆建,倪晓武,贺安之.激光与材料相互作用物理学[M].北京:机械工业出版社,1996.LU J,NI X W,HE A ZH.Interactive Physics of Laser and Materials[M].Beijing:China Machine Press,1996.(in Chinese)
[14] 吴东江,许媛,王续跃,等.激光清洗硅片表面A12O3颗粒的试验和理论分析[J].光学精密工程,2006,14(5):764-770.WU D J,XU Y,WANG X Y,et al..Experimental and theoretical study on laser cleaning Al2O3 particle on siliconwafer surface[J].Opt.Precision Eng.,2006,14(5):764-770.(in Chinese)
吴东江, 马广义, 周秋菊, 许卫星, 许媛, 王续跃, 赵福令. 长脉宽脉冲激光硅片弯曲成形试验[J]. 光学 精密工程, 2007, 15(9): 1361. 吴东江, 马广义, 周秋菊, 许卫星, 许媛, 王续跃, 赵福令. Experimental study of bending silicon chip with long pulse width laser[J]. Optics and Precision Engineering, 2007, 15(9): 1361.