用YAG脉冲激光轰击真空室内的石墨靶, 可以形成包含碳素的激光等离子体, 并在硅或石英衬底上淀积形成某种类型的碳膜。 用光学多道分析仪原位测量了激光等离子体的发射光谱, 给出反应空间可能存在的反应基团有碳原子、 碳离子、 碳分子等, 用拉曼光谱研究了薄膜的结构, 证明所形成的薄膜为类金刚石膜, 并得出碳原子和碳离子与薄膜的类金刚石结构有关。 制备过程中, 氢的参与有利于薄膜中 金刚石成分的形成。 空间分辨的原位激光等离子体发射光谱表明, 在反应空间存在薄膜形 成的最佳位置。

Using YAG pulse laser ablation of a graphite target in vacuum chamber, laser plasma including carbon species can be produced, and a kind of carbon thin films can be formed on the silicon or quartz substrates. The possible radicals and their spatial distribution in the reaction chamber were probed by in situ optical emission spectroscopy of the laser plasma using optical multi-channel analyzer. The structure of the films was analyzed by Raman spectroscopy. It reveals that the films are diamond-like structure, and the atomic carbon and carbon ions are responsible for the formation of diamond-like structure of the films. The inlet of hydrogen in the reaction chamber much enhances the diamond component in the films. The spatial resolved optical emission spectroscopy indicates that there is a optimum position for the film formation in the reaction chamber.