一种光强正交调制的新型线性位移传感器研究

介绍了一种光强正交调制式新型线性位移检测方法。该方法采用基于光强正交变化的两路电驻波合成电行波信号，将空间位移的变化调制到电行波信号相位差的变化上，用鉴相的方法实现空间位移的测量。为了优化传感参数并提高测量精度，对传感器不同参数条件下光场分布情况与误差特性进行了研究。根据其结构特征，对光场分布引起的测量误差进行分析，并利用Tracepro软件建立三维光场仿真模型，对不同参数条件下光场分布进行分析；再通过实验验证，得到不同参数与误差特性之间的关系；根据仿真和实验结果，对传感器参数进行优化设计。初步实验表明：在108 mm测量范围内，传感器精度达到±0.5 μm。为此新型传感器优化设计和精度提高提供了可靠的理论依据和技术支持。

Abstract

A novel linear displacement detected method based on electrical travelling wave generation using alternating light field standing wave is proposed. By modulating the displacement values to the changes of phase difference of electrical travelling wave signal, the spatial displacement is measured by using the method of phase discrimination. In order to optimize the sensor parameters and improve the measurement precision, the error characteristics, caused by light scatting phenomenon, are studied under different parameter conditions. Firstly, according to the characteristics of the sensor structure, measurement error caused by light field distribution is theoretically analyzed and a three-dimensional simulation model is built using the Tracepro software to analyze the light field distribution under different parameter conditions. And then, the relationship between the light field distribution under different parameters and error characteristics is obtained by experimental verification. Finally, the sensing parameters can be optimized based on the simulation and experimental results. The preliminary experimental results prove that the measuring errors of the sensor are controlled within ±0.5 μm for an effective measuring range of 108 mm. A reliable basis of theoretic and technical is provided for the further design optimization and precision improvement of sensor.

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彭东林, 付敏, 朱革, 郑方燕, 李彦. 一种光强正交调制的新型线性位移传感器研究[J]. 光学学报, 2014, 34(12): 1212007. Peng Donglin, Fu Min, Zhu Ge, Zheng Fangyan, Li Yan. Study on a Novel Linear Displacement Sensor Based on the Orthogonal Modulating Light Intensity[J]. Acta Optica Sinica, 2014, 34(12): 1212007.

一种光强正交调制的新型线性位移传感器研究

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