光学学报, 2019, 39 (1): 0126012, 网络出版: 2019-05-10
基于整形飞秒激光脉冲的三维微纳制备 
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Three-Dimensional Microfabrication by Shaped Femtosecond Laser Pulses
图 & 表
图 1. (a)飞秒激光狭缝整形直写的实验装置示意图;(b)传统方式聚焦直写的波导截面;(c)狭缝整形直写的波导截面[18]
Fig. 1. (a) Experimental setup for femtosecond laser direct writing with slit shaping; (b) cross section of waveguide fabricated by conventional focusing direct writing; (c) cross section of waveguide fabricated by direct writing with slit shaping[18]
图 2. (a)传统聚焦模式和(b)经狭缝整形后焦点附近的模拟光强[18]
Fig. 2. Simulated light intensity distributions around focal spot with (a) conventional focusing scheme and (b) slit shaped focusing[18]
图 3. 狭缝整形脉冲聚焦得到的焦点处光场分布。(a) 200 μm狭缝;(b) 2000 μm狭缝;(c) 6 μm 边长“口”字型;(d) 160 μm狭缝;(e) 2400 μm狭缝;(f) 12 μm 边长“口”字型[29]
Fig. 3. Laser intensity distributions at focus of slit-shaped beams. (a) Slit width of 200 μm; (b) slit width of 2000 μm; (c) mouth type with side length of 6 μm; (d) slit width of 160 μm; (e) slit width of 2400 μm; (f) mouth type with side length of 12 μm[29]
图 4. (a)实验装置示意图;(b)环状光波导;(c) s偏振光和(d) p偏振光在波导中传输的近场模场光强分布[29-31]
Fig. 4. (a) Schematic of experimental setup; (b) square-shaped waveguide; near-field mode light intensity distributions of (c) s-polarized beam and (d) p-polarized beam in the waveguide[29-31]
图 6. (a)~(c)焦点处模拟光强分布;(d)~(f)激光直写的微流体通道横截面光学显微图像[34]
Fig. 6. (a)-(c) Simulated light intensity distributions at focus; (d)-(f) cross-sectional optical micrographs of microfluidic channels fabricated by femtosecond laser direct writing[34]
图 7. Foturan玻璃中(a)传统聚焦和(b)时空聚焦焦点的截面显微图像;(c)利用时空聚焦系统在Foturan玻璃内部直写的中国馆结构[36]
Fig. 7. Cross-sectional optical micrographs in Foturan glass with (a) conventional focusing scheme and (b) simultaneous spatial and temporal focusing (SSTF) scheme; (c) China Pavilion structure written in Foturan glass with SSTF scheme[36]
图 8. (a)飞秒激光时空聚焦3D打印装置;(b)时空聚焦3D打印分辨率控制[40]
Fig. 8. (a) Schematic of setup for femtosecond laser SSTF 3D printing; (b) resolution control in SSTF 3D printing
图 9. 飞秒激光时空聚焦双光子打印图像。(a) 2 mm高的中国狮子扫描电子显微镜(SEM)图;(b) 13 mm高的兵马俑模型照片[40]
Fig. 9. Two-photon printed image obtained by femtosecond laser SSTF. (a) Scanning electron microscope (SEM) image of 2 mm high Chinese lion sculpture; (b) digital photo of 13 mm high Terra Cotta Warrior sculpture[40]
图 10. (a) (b)啁啾脉冲直写截面照片;(c)(d)传统聚焦直写截面照片;(e)(f)腐蚀得到的微流通道截面图和俯视图[50]
Fig. 10. (a)(b) Cross-sectional images with chirped pulse direct writing; (c)(d) cross-sectional images with conventional focusing direct writing; (e)(f) cross-sectional images and top views of corroded microcirculation channel[50]
图 11. (a)角锥棱镜产生的贝塞尔光束及其光强分布示意图;(b)使用贝塞尔光束在玻璃中制备高深径比的纳米通道SEM图像[53]
Fig. 11. (a) Bessel beam generated with an axicon and its intensity distribution; (b) high aspect ratio nano-channel SEM image fabricated in glass with Bessel beam[53]
图 12. (a)相位板整形贝塞尔光束及其光强分布;(b)相位板结构示意图;分别使用(c)高斯光束、(d)传统贝塞尔光束、(e) BPP 1整形后的贝塞尔光束和(f) BPP 2整形后的贝塞尔光束进行TSV加工的截面SEM图[54]
Fig. 12. (a) Phase plate shaped Bessel beam and its light intensity distribution; (b) structural diagram of phase plate; cross-sectional SEM images of TSV fabricated with (c) Gaussian beam, (d) conventional Bessel beam, (e) BPP 1-shaped Bessel beam by and (f) BPP 2-shaped Bessel beam[54]
乔玲玲, 储蔚, 王哲, 程亚. 基于整形飞秒激光脉冲的三维微纳制备[J]. 光学学报, 2019, 39(1): 0126012. Lingling Qiao, Wei Chu, Zhe Wang, Ya Cheng. Three-Dimensional Microfabrication by Shaped Femtosecond Laser Pulses[J]. Acta Optica Sinica, 2019, 39(1): 0126012.
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