两种中波红外薄膜材料的光学特性研究

段微波; 刘定权; 张凤山; 严义埙

光学学报, 2009, 29 (s1): 177, 网络出版: 2009-06-25

两种中波红外薄膜材料的光学特性研究

Study on Optical Properties of Two Thin Film Materials in Medium-Wave Infrared Band

论文大纲

段微波 ^*刘定权张凤山严义埙

作者单位

中国科学院上海技术物理研究所, 上海 200083

薄膜中波红外锗和一氧化硅材料的特性 thin films medium-wave infrared band germanium and silicon monoxide material properties

摘要

锗和一氧化硅是中波红外区域通常使用的薄膜材料, 研究这些材料的特性, 找到最佳制备工艺并拟合出材料的光学常数, 是设计制备中波红外光学薄膜的关键。最佳工艺条件下, 选用以上两种材料, 以蓝宝石为基底, 设计并制备出中心波长为3.5 μm, 相对带宽4.8%的三腔带通滤光片, 其通带透过率可达80%。经光谱测试和环境可靠性实验结果表明, 该中波红外带通滤光片满足工程使用要求。

Abstract

Germanium and silicon monoxide are two kinds of optical thin film materials used frequently in medium-wave infrared band. Study on their optical properties is the key to design and fabricate medium-band thin film. Germanium and silicon monoxide are selected as high and low refractive index materials respectively and the substrate is synthetic sapphire. Triple cavity band-pass filter of which the center wavelength is 3.5 μm, relative bandwidth is 4.8%, and transmittance of pass-band is about 80%, was designed and fabricated. Spectrum measurement and environment reliability experiment show that the infrared band-pass filter is competent for engineering application.

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段微波, 刘定权, 张凤山, 严义埙. 两种中波红外薄膜材料的光学特性研究[J]. 光学学报, 2009, 29(s1): 177. Duan Weibo, Liu Dingquan, Zhang Fengshan, Yan Yixun. Study on Optical Properties of Two Thin Film Materials in Medium-Wave Infrared Band[J]. Acta Optica Sinica, 2009, 29(s1): 177.

两种中波红外薄膜材料的光学特性研究

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