基于Ptychography的极紫外光刻投影物镜波像差检测技术
方伟, 唐锋, 王向朝, 朱鹏辉, 李杰, 孟泽江, 张恒. 基于Ptychography的极紫外光刻投影物镜波像差检测技术[J]. 光学学报, 2016, 36(10): 1012002.
Fang Wei, Tang Feng, Wang Xiangzhao, Zhu Penghui, Li Jie, Meng Zejiang, Zhang Heng. Measurement of Wavefront Aberration of Extreme Ultraviolet Lithographic Projection Lens Based on Ptychography[J]. Acta Optica Sinica, 2016, 36(10): 1012002.
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方伟, 唐锋, 王向朝, 朱鹏辉, 李杰, 孟泽江, 张恒. 基于Ptychography的极紫外光刻投影物镜波像差检测技术[J]. 光学学报, 2016, 36(10): 1012002. Fang Wei, Tang Feng, Wang Xiangzhao, Zhu Penghui, Li Jie, Meng Zejiang, Zhang Heng. Measurement of Wavefront Aberration of Extreme Ultraviolet Lithographic Projection Lens Based on Ptychography[J]. Acta Optica Sinica, 2016, 36(10): 1012002.
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