强激光与粒子束, 2010, 22 (12): 2889, 网络出版: 2011-01-05   

空心聚苯乙烯微球电沉积金工艺

Electrodepositing of Au on hollow PS micro-spheres
作者单位
1 西南科技大学 材料科学与工程学院, 四川 绵阳 621010
2 中国工程物理研究院 激光聚变研究中心, 四川 绵阳621900
3 电子科技大学 微电子与固体电子学院, 成都 610054
摘要
采用自行设计的微球电沉积装置, 建立了空心聚苯乙烯(PS)微球的电化学沉积金工艺。实验条件为:电源输出电压0.7~0.8 V, 电流密度2.0 mA·cm-2, 镀液温度45 ℃, 阴极转速250 r·min-1, 镀液流速7 mL·min-1·cm-2。在此工艺条件下制得的空心金微球对称性和厚度均匀性良好, 表面粗糙度低于500 nm, 微球表面沉积金速率约为6 μm·h-1。
Abstract
Using the self-regulating new micro-sphere electrodepositing device, the techniques of electrodepositing gold on hollow PS micro-spheres were established. The experiment was carried out under the following conditions:voltage was about 0.7~0.8 V, current density was 2.0 mA·cm-2, the temperature was 45 ℃, cathode rotating rate was 250 r·min-1, flow rate of the solution was 7 mL·min-1·cm-2. Hollow gold-plated micro-spheres were prepared with well spherical symmetr, uniform thickness and surface smoothness under 500 nm. The speed of the gold depositing was 6 μm·h-1.
参考文献

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孙敬远, 张云望, 杜凯, 万小波, 肖江, 张伟, 陈静, 张林. 空心聚苯乙烯微球电沉积金工艺[J]. 强激光与粒子束, 2010, 22(12): 2889. Sun Jingyuan, Zhang Yunwang, Du Kai, Wan Xiaobo, Xiao Jiang, Zhang Wei, Chen Jing, Zhang Lin. Electrodepositing of Au on hollow PS micro-spheres[J]. High Power Laser and Particle Beams, 2010, 22(12): 2889.

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