红外与激光工程, 2015, 44 (6): 1884, 网络出版: 2016-01-26   

基于斜率的TMT三镜面形检测方法

TMT M3 mirror figure measurement with slope method
作者单位
1 中国科学院长春光学精密机械与物理研究所,吉林 长春 130033
2 中国科学院大学,北京 100049
摘要
为了完成对于30 m望远镜(TMT)三镜面形的检测,引入了基于斜率的测量方法。首先,针对斜率信息分别提出了对于低阶像差拟合以及中频误差分析的方法,并利用数值仿真以及实测数据对于之前提出的理论进行验证;最后,针对所提出的方法进行了基于蒙特卡洛法的误差分配,讨论了在TMT招标方所提出的精度要求下,各个检测仪器的精度如何分配。文中使用的方法,不仅对于TMT三镜的面形检测有很好的指导作用,同时对于类似的大口径平面镜的检测也有一定助力作用。
Abstract
The slope methods was introduced to measure the TMT M3 mirror figure. First of all,the low order aberrant and middle spatial frequency aberrant were studied for the search of property plan to test and analyse them. Then the problem was considered numerically for the prove of theory, furthermore, the experiment was also done to confirm the feasibility of this plan. Lastly, for the error budget of this system, the Monte Carlo method was introduced to allocate the error to the instrument of the sub-system for request of TMT. The tertiary mirror of TMT and other reflecting mirror frequency feature, and quantification could be measured. As a result, it could give more sufficient technical guidance on the testing for the large aperture reflect mirror.
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安其昌, 张景旭, 杨飞, 乔兵. 基于斜率的TMT三镜面形检测方法[J]. 红外与激光工程, 2015, 44(6): 1884. An Qichang, Zhang Jingxu, Yang Fei, Qiao Bing. TMT M3 mirror figure measurement with slope method[J]. Infrared and Laser Engineering, 2015, 44(6): 1884.

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