调焦调平探测光斑位置误差对测量准确度影响的研究
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廖飞红, 李小平, 陈学东, 李志丹. 调焦调平探测光斑位置误差对测量准确度影响的研究[J]. 光学学报, 2010, 30(4): 1041. Liao Feihong, Li Xiaoping, Chen Xuedong, Li Zhidan. Probe Spot Position Error on the Accuracy of Focusing and Leveling Measurement System[J]. Acta Optica Sinica, 2010, 30(4): 1041.