微波电子回旋共振-化学气相沉积SiNx薄膜的光学性能研究
叶超, 宁兆元, 项苏留, 沈明荣, 汪浩, 甘肇强. 微波电子回旋共振-化学气相沉积SiNx薄膜的光学性能研究[J]. 光学学报, 1997, 17(4): 489.
叶超, 宁兆元, 项苏留, 沈明荣, 汪浩, 甘肇强. Optical Properties of SiNx Films Prepared by Microwave ECR-CVD[J]. Acta Optica Sinica, 1997, 17(4): 489.
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叶超, 宁兆元, 项苏留, 沈明荣, 汪浩, 甘肇强. 微波电子回旋共振-化学气相沉积SiNx薄膜的光学性能研究[J]. 光学学报, 1997, 17(4): 489. 叶超, 宁兆元, 项苏留, 沈明荣, 汪浩, 甘肇强. Optical Properties of SiNx Films Prepared by Microwave ECR-CVD[J]. Acta Optica Sinica, 1997, 17(4): 489.
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