HF酸腐蚀提高K9基板损伤阈值
曹翀, 张锦龙. HF酸腐蚀提高K9基板损伤阈值[J]. 强激光与粒子束, 2015, 27(6): 061004.
Cao Chong, Zhang Jinlong. Improve K9 glass substrate damage threshold by HF etching[J]. High Power Laser and Particle Beams, 2015, 27(6): 061004.
[1] Campbell J H.Damage resistant optics for a mega-joule solid-state laser[C]//Proc of SPIE.1990,1441:444-456.
[2] Hervé Bercegol.The impact of laser damage on the lifetime of optical components in fusion lasers[C]//Proc of SPIE.2004,5272:312-324.
[3] Shen Jian,Liu Shouhua,Yi Kui,et al.Subsurface damage in optical substrates[J].Optik,2005,116(6):288-294.
[5] 潘鑫,马志斌,李国伟,等.氧等离子体刻蚀CVD金刚石膜的影响机理[J].强激光与粒子束,2014,26:074001.(Pan Xin,Ma Zhibin,Li Guowei,et al.Mechanism of etching CVD diamond film by oxygen plasma.High Power Laser and Particle Beams,2014,26:074001)
[6] Trecard M,Dumas P R,Golini D.New industrial applications of magnetorheological finishing[R].Rochester:Optical Fabrication and Testing.2004.
[7] Davies M A.Application of precision diamond machining to the manufacture of micro-photonics components[C]//Proc of SPIE.2003:5183:94-108.
[10] 徐世珍,吕海兵,田东斌,等.酸蚀深度对熔石英三倍频激光损伤阈值的影响[J].强激光与粒子束,2008,20(5):760-764.(Xu Shizhen,Lü Haibing,Tian Dongbin,et al.Effects of acid-etching depth on 355 nm laser-induced damage threshold of fused silica.High Power Laser and Particle Beams,2008,20(5):760-764)
[12] Suratwala T I.HF-based etching processes for improving laser damage resistance of fused silica optical surfaces[J].J Am Ceram,2011,94(2):416-428.
[13] Bouchut.Wet chemical etching of silicate glasses in hydrofluoric acid based solutions[C]//Proc of SPIE.2003,4932:103-111.
[14] ISO 11254-1.Lasers and laser-related equipment- Determination of evaporation of laser-induced damage threshold of optical surfaces—Part 1:1-on-1 test[S].
[15] ISO 11254-2.Lasers and laser-related equipment- Determination of evaporation of laser-induced damage threshold of optical surfaces—Part 2:S-on-1 test[S].
[16] Jean H,Pierre G,Jean D,et al.R-on-1 automatic mapping:a new tool for laser damage testing[C]//Proc of SPIE.1996,2714:90-101.
[17] Polar K,Peter A.Etching study on beta barium metaborate(β-BaB2O4) single crystals[J].Journal of Crystal Growth,1993,134:219- 226.
曹翀, 张锦龙. HF酸腐蚀提高K9基板损伤阈值[J]. 强激光与粒子束, 2015, 27(6): 061004. Cao Chong, Zhang Jinlong. Improve K9 glass substrate damage threshold by HF etching[J]. High Power Laser and Particle Beams, 2015, 27(6): 061004.