光学学报, 2001, 21 (12): 1467, 网络出版: 2006-08-10  

用于X射线成像的非晶硒合金膜的制备和性能测试

Preparation and Properties of Amorphous Selenium Alloy Film for X-Ray Imaging
作者单位
1 中国科学院西安光学精密机械研究所光电子部,西安,710068
2 西北大学分析测试研究中心,西安,710069
摘要
在X射线诊断成像方面,非晶硒(a-Se)是最有前途的探测材料之一.通过实验研究了a-Se合金膜的制备方法,用飞行时间方法测量了载流子的漂移迁移率和寿命,讨论了对a-Se合金膜性能有重要影响的因素.通过对400 μm厚a-Se合金膜X 射线光电流的测量,确定了a-Se合金膜对X射线的光电响应特性.实验表明,a-Se合金膜具有线性的光电转换特性;灵敏度与场强有关.在10 V/μm场强下,对于医疗诊断常用的轫致辐射X射线谱,用X射线在a-Se合金膜中产生一电子-空穴对约需45 eV的能量.
Abstract
Amorphous selenium alloy (a Se alloy) is currently of great interest as X ray imaging receptor due to its high resolution. The a Se alloy films are deposited by vacuum evaporation, the transport properties of hole and electron are measured by time of flight technique. Some factors, which affect the properties of a Se alloy film, are discussed. X ray photocurrent is measured by using 400μm thick film. The results show that linear photoelectric conversion existed in a Se alloy film, and its sensitivity to X ray irradiation depends on electric field. The calculation indicates that about 45 eV is needed for X ray to release an electric hole pair in a Se alloy film at 10 V/μm electric field.
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徐向晏, 牛憨笨, 阔晓梅, 王云程, 郭振琪. 用于X射线成像的非晶硒合金膜的制备和性能测试[J]. 光学学报, 2001, 21(12): 1467. 徐向晏, 牛憨笨, 阔晓梅, 王云程, 郭振琪. Preparation and Properties of Amorphous Selenium Alloy Film for X-Ray Imaging[J]. Acta Optica Sinica, 2001, 21(12): 1467.

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