基于CCD尺寸测量中图像边缘退化及恢复技术研究

刘宾; 王黎明; 赵霞

doi:doi:10.5768/jao201334.0603002

应用光学, 2013, 34 (6): 995, 网络出版: 2013-12-04

基于CCD尺寸测量中图像边缘退化及恢复技术研究

Restoration of degraded edge in size measurement based on CCD image

论文大纲

刘宾 ^*王黎明赵霞

作者单位

中北大学　电子测试技术国家重点实验室，山西太原 030051

尺寸测量直边衍射边缘退化边缘恢复 size measurement straight edge diffraction edge degradation edge restoration

摘要

针对直边衍射效应造成的图像边缘退化问题，建立边缘退化模型。从菲涅尔直边衍射理论出发，基于信号与系统理论的图像边缘退化数学描述方法，分析了造成图像边缘退化的原因。通过分析不同光源波长和成像物距下直边衍射强度分布曲线的特点，构造简单函数实现衍射光强分布的近似，进而得到退化系统传递函数; 利用退化系统传递函数构造滤波器对获取图像的边缘进行恢复，从而提高尺寸测量精度。实验结果表明: 经边缘恢复方法校正后的测量结果误差约为0.02 mm，相对未校正数据的测量结果误差减小0.04 mm，提高了尺寸测量精度。

Abstract

For image edge degradation problems caused by straight edge diffraction, an edge degradation model was established. Starting from Fresnel diffraction theory, reasons for image edge degradation were discussed based on mathematical description of image edge degradation of signal and system theory. By analyzing the characteristic of intensity distribution curve of straight edge diffraction in case of different wavelengths of light source and distances from image and object, a simple function was used to represent distribution of straight edge diffraction, and the transfer function of the degradation system was obtained. Then the transfer function of the degradation system was used to realize the restoration of the degraded edge. Experimental results indicate that the presented method has better effects on restoration of the degraded edge caused by straight edge diffraction. The measurement error based on corrected data is 0.02 mm, which reduces 0.04 mm comparing to the measurement error based on original data.

参考文献

[1] 李弼程, 彭天强.智能图像处理技术[M]. 北京: 电子工业出版社, 2004.

LIE Bi-cheng, PENG Tian-qiang．Intelligent image processing[M]．Beijing: Publishing House of Electronic Industry，2004．(in Chinese)

[2] 付树军,阮秋琦,穆成坡,等. 基于非线性扩散滤波的边缘检测和图像测量[J]. 光学精密工程,2007,15 (2) : 289-293.

FU Shu-jun, RUAN Qiu-qi, MU Cheng-po, et al. Edge detection for image measurement based on nonlinear diffusion filtering [J] . Opt. Precision Eng.,2007, 15(2): 289-293. (in Chinese with an English abstract)

[3] 李弼程, 郭志刚, 文超. 图像的多层次模糊增强与边缘提取[J]. 模糊系统与数学, 2000,14(4): 77-83.

LIE Bi-cheng, GUO Zhi-gang, WEN Chao.Multi-level fuzzy enhancement and edge extraction of images[J].Fuzzy Systems and Mathematics, 2000,14(4): 77-83. (in Chinesewith an English abstract)

[4] 张俊杰, 曹晶晶, 贡力,等. 微型零件图像测量清晰度算法和选择与综合评价[J]. 光学精密工程, 2008,16(3): 543-547.

ZHANG Jun-jie, CAO Jing-jing, GONG Li, et al. Selection and synthesis evaluation of image measurement definition algorithm for miniature parts[J]. Opt. Precision Eng., 2008, 16 (3) : 543-547. (in Chinese with an English abstract)

[5] 贺秋伟,王龙山,刘庆民，等. 基于支持向量回归的小尺寸零件精密测量[J]. 光学精密工程,2007,15 (4): 557-563.

HE Qiu-wei, WANG Long-shan, LIU Qing-min, et al.Precision measurement for small size part s based on support vector regression [J]. Opt. Precision Eng. ,2007,15(4) : 557-563. (in Chinese with an English abstract)

[6] 武东生，刘秉琦.小波变换在CCD图像边缘检测中的应用[J].应用光学，2004，25(2): 48-50.

WU Dong-sheng, LIU Bing-qi. The application of wavelet tranoform in CCD image edge detection[J]. Journal of Applied Optics, 2004, 25(2): 48-50.(in Chinese with an English abstract)

[7] 段瑞玲，李庆祥，李玉和.图像边缘检测方法研究综述[J]. 光学技术，2005，31(3): 415-419.

DUAN Rui-ling, LI Qing-xiang, LI Yu-he. Summary of image edge detection[J]. Optical Technique, 2005,31(3): 415-419.(in Chinese with an English abstract)

[8] 谢敬辉，赵达尊，阎吉祥．物理光学教程[M]．北京: 北京理工大学出版社，2005．

XIE Jing-hui, ZHAO Da-zun,YAN Ji-xiang． Physical and optical engineering [M]．Beijing: Beijing Institute of Technology Press，2005．(in Chinese)

[9] 张广军. 激光直边衍射CCD位移测量方法[J]. 实用测试技术，1994,6(2): 36-37.

ZHANG Guang-jun. Selection and synthesis evaluation of image measurement definition algorithm for miniature parts[J]. Opt. Precision Eng., 2008 , 16 (3) : 543-547. (in Chinese with an English abstract)

[10] YU Heng-yong , ZHAO Shi-ying, WANG Ge. A differentiable shepp-logan phantom and its applications in exact cone-beam CT[J]. Phys. Med. Biol., 2005,50 : 5583-5595.

刘宾, 王黎明, 赵霞. 基于CCD尺寸测量中图像边缘退化及恢复技术研究[J]. 应用光学, 2013, 34(6): 995. LIU Bin, WANG Li-ming, ZHAO Xia. Restoration of degraded edge in size measurement based on CCD image[J]. Journal of Applied Optics, 2013, 34(6): 995.

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