发光学报, 2018, 39 (9): 1272, 网络出版: 2018-09-08   

磁控溅射制备本征ZnO/Ag/ZnO透明导电薄膜的性质研究

Properties of ZnO/Ag/ZnO Transparent Conducting Thin Films Prepared by Magnetron Sputtering
作者单位
1 辽宁科技大学 化学工程学院, 辽宁 鞍山 114051
2 辽宁科技大学 表面工程研究所, 辽宁 鞍山 114051
3 鞍钢集团钢铁研究院 海洋装备用金属材料及其应用国家重点实验室, 辽宁 鞍山 114051
引用该论文

李彤, 周艳文, 王艳雪, 赵卓, 武俊生, 王晓明, 高鹏. 磁控溅射制备本征ZnO/Ag/ZnO透明导电薄膜的性质研究[J]. 发光学报, 2018, 39(9): 1272.

LI Tong, ZHOU Yan-wen, WANG Yan-xue, ZHAO Zhuo, WU Jun-sheng, WANG Xiao-ming, GAO Peng. Properties of ZnO/Ag/ZnO Transparent Conducting Thin Films Prepared by Magnetron Sputtering[J]. Chinese Journal of Luminescence, 2018, 39(9): 1272.

参考文献

[1] 李荣荣, 赵晋津, 司华燕, 等. 柔性薄膜太阳能电池的研究进展 [J]. 硅酸盐学报, 2014, 42(7):878-883.

    LI Y Y, ZHAO J J, SI H Y, et al.. Research progress of flexible thin film solar cells [J]. J. Silicate, 2014, 42(7):878-883. (in Chinese)

[2] 申德振, 梅增霞, 梁会力, 等. 氧化锌基材料、异质结构及光电器件 [J]. 发光学报, 2014, 35(1):1-60.

    SHEN D Z, MEI Z X, LIANG H L, et al.. Zinc oxide based materials, heterostructures and optoelectronic devices [J]. Chin. J. Lumin., 2014, 35(1):1-60. (in Chinese)

[3] 廖雅琴, 李愿杰, 黄添懋, 等. 透明导电薄膜现状与发展趋势 [J]. 东方电气评论, 2014, 128(109):13-18.

    LIAO Y Q, LI Y J, HUANG T M, et al.. Status and development trend of transparent conductive film [J]. Dongfang Electric Rev., 2014, 128(109):13-18. (in Chinese)

[4] 刘晓菲, 王小平, 王丽军, 等. 透明导电薄膜的研究进展 [J]. 激光与光电子学进展, 2012, 49(10):26-35.

    LIU X F, WANG X P, WANG L J, et al.. Research progress of transparent conductive thin films [J]. Laser Optoelectron. Prog., 2012, 49(10):26-35. (in Chinese)

[5] 李源浩, 武聪伶, 杨君礼, 等. 基于MoO3/Ag/MoO3透明阳极的顶发射OLED的模拟计算与制备 [J]. 发光学报, 2015, 36(4):459-465.

    LI Y H, WU C L, YANG J L, et al.. Simulation and preparation of top emitting OLED based on MoO3/Ag/MoO3 transparent anode [J]. Chin. J. Lumin., 2015, 36(4):459-465. (in Chinese)

[6] 于仕辉, 丁玲红, 薛闯, 等. 氧氩比对SnO2/Ag/SnO2透明导电膜光电性能的影响 [J]. 光子学报, 2012, 41(9):1086-1089.

    YU S H, DING L H, XUE C, et al.. Influence of O2/Ar ration on the properties of transparent conductive SnO2/Ag/SnO2 trilayer film [J]. Acta Photon. Sinica, 2012, 41(9):1086-1089. (in Chinese)

[7] TANG K, GU S L, YE J D, et al.. Mutually beneficial doping of tellurium and nitrogen in ZnO films grown by metal-organic chemical vapor deposition [J]. J. Vac. Sci. Technol. A, 2012, 30(5):051508-1-9.

[8] 刘思宁, 周艳文, 吴川, 等. 粉末靶制备的AZO/Ag/AZO透明导电薄膜的光电性能 [J]. 发光学报, 2015, 36(12):1427-1433.

    LIU S N, ZHOU Y W, WU C, et al.. Optical and electrical properties of AZO/Ag/AZO transparent conductive films prepared by RF magnetron sputtering using powder targets [J]. Chin. J. Lumin., 2015, 36(12):1427-1433. (in Chinese)

[9] 吴伟梁, 林文杰, 赵影文, 等. 金属氧化物多层膜背接触晶体硅太阳电池 [J]. 太阳能, 2017(4):35-38.

    WU W L, LIN W J, ZHAO Y W, et al.. Metal oxide multilayer film back contact crystalline silicon solar cells [J]. Solar Energy, 2017(4):35-38. (in Chinese)

[10] 孙瑶, 汪洪. 介质/金属/介质透明导电多层膜的椭圆偏振光谱研究 [J]. 激光与光电子学进展, 2016, 53(10):259-266.

    SUN Y, WANG H. Ellipsometric study of D/M/D transparent conductive multilayers [J]. Laser Optoelectron. Prog., 2016, 53(10):259-266. (in Chinese)

[11] 郭亮, 赵东旭, 张振中, 等. ZnO/Ag/ZnO多层结构薄膜的光电性质 [J]. 发光学报, 2011, 32(9):920-923.

    GUO L, ZHAO D X, ZHANG Z Z, et al.. Photoelectric properties of ZnO/Ag/ZnO multilayer structure thin films [J]. Chin. J. Lumin., 2011, 32(9):920-923. (in Chinese)

[12] 刘汉法, 张化福, 王振环. 薄膜厚度对TGZO透明导电薄膜光电性能的影响 [J]. 真空科学与技术学报, 2011, 31(2): 183-186.

    LIU H F, ZHANG H F, WANG Z H. Effect of film thickness on photoelectric properties of TGZO transparent conductive thin films [J]. J. Vac. Sci. Technol., 2011, 31(2):183-186. (in Chinese)

[13] 战可涛, 曾凡强. 铝镧共掺ZnO透明导电薄膜的微观结构和光电性能研究 [J]. 光学学报, 2011, 31(s1):s100110.

    ZHAN K T, ZENG F Q. Microstructure and optical and electrical properties of Al-lanthanum-doped ZnO transparent conducting thin films [J]. Acta Opt. Sinica, 2011, 31(s1):s100110. (in Chinese)

[14] VAN EEK S, YAN X, LI W M, et al.. Investigation of material properties and thermal stabilities of magnetron-sputter-deposited ZnO∶Al/Ag/ZnO∶Al transparent conductive coatings for thin-film solar cell applications [J]. Jpn. J. Appl. Phys., 2017, 56:08MA12-1-6.

[15] KIM J H, LEE J H, KIM S W, et al.. Highly flexible ZnO/Ag/ZnO conducting electrode for organic photonic devices [J]. Ceram. Int., 2015, 41:7146-7150.

[16] 汤洋, 郭逦达, 张增光, 等. 硝酸铵诱导电沉积氧化锌纳米柱的铝掺杂及光学性质操控 [J]. 光学 精密工程, 2015, 23(5):1288-1296.

    TANG Y, GUO L D, ZHANG Z G, et al.. Aluminum doping and optical property control of electrodeposited zinc oxide nanorods induced by ammonium nitrate [J]. Opt. Precision Eng., 2015, 23(5):1288-1296. (in Chinese)

[17] 彭廉钦, 田晶, 王域, 等. 磁控溅射制备CdS/ZnO复合薄膜及其光电性能研究 [J]. 西南民族大学学报(自然科学版), 2015, 41(1):77-82.

    PENG L Q, TIAN J, WANG Y, et al.. Preparation of CdS/ZnO composite films by magnetron sputtering and their photoelectric properties [J]. J. Southwest Univ. Nation.(Na.Sci. Edi.), 2015, 41(1):77-82. (in Chinese)

[18] ANDO E, MIYAZAKI M. Moisture resistance of the low-emissivity coatings with a layer structure of Al-doped ZnO/Ag/Aldoped ZnO [J]. Thin Solid Films, 2001, 392(2):289-294.

[19] MEREU B, CAGLAR O, CASHMORE J S, et al.. Window p-layer in amorphous pin solar cells using ZnO as trans-parent conductive oxide [J]. Solar Energy Mater. Solar Cells, 2016, 152:147-154.

李彤, 周艳文, 王艳雪, 赵卓, 武俊生, 王晓明, 高鹏. 磁控溅射制备本征ZnO/Ag/ZnO透明导电薄膜的性质研究[J]. 发光学报, 2018, 39(9): 1272. LI Tong, ZHOU Yan-wen, WANG Yan-xue, ZHAO Zhuo, WU Jun-sheng, WANG Xiao-ming, GAO Peng. Properties of ZnO/Ag/ZnO Transparent Conducting Thin Films Prepared by Magnetron Sputtering[J]. Chinese Journal of Luminescence, 2018, 39(9): 1272.

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